The chemical aspects of materials processing used for electronic applications, e.g. Si, III-V compounds, superconductors, metallization materials, are covered in this volume. Significant recent advances have occurred in the development of new volatile precursors for the fabrication of III-V semiconductor and metal [Cu, W] films by OMCVD. Some fundamentally new and wide-ranging applications have been introduced in recent times. Experimental and modeling studies regarding deposition kinetics, operating conditions and transport as well as properties of films produced by PVD, CVD and PECVD are discussed. The thirty papers in this volume report on many other significant topics also. Research workers involved in these aspects of materials technology may find here some new perspectives with which to augment their projects.
An Introduction to Electronic Materials for Engineers aims to give a basic understanding and comprehensive overview of a wide range of materials, such as conducting materials, semiconductors, magnetic materials, optical materials, dielectric materials, superconductors, thermoelectric materials and ionic materials. The new chapters added into this latest edition include thin film electronic materials, organic electronic materials and nanostructured materials. These chapters aim to reflect the new developments made in electronic materials and nanotechnology research towards the design and fabrication of modern equipment and electronic devices.This book is designed for undergraduate engineering and technology students who have background knowledge of physics and chemistry, as well as for engineers who work on materials processing or application, or electric/electronic engineering.It emphasizes on the synthesis, performance and application of electronic materials and will enable readers to understand and relate to the devices and materials.
The intention of this text is not to provide a comprehensive reference to all aspects of semiconductor device fabrication. After all there are myriad books already on that subject by authors more expert than I. Nor is it intended to be a review of 'research results' that, irrespective of their promise, have not been adopted into mainstream production. In this case there are enough academics touting their own results with promises of 'saving the planet'. Instead it is aimed to provide a useful reference for those interested in the chemical aspects of the electronics industry.
A thorough introduction to fundamental principles andapplications From its beginnings in metallurgy and ceramics, materials sciencenow encompasses such high- tech fields as microelectronics,polymers, biomaterials, and nanotechnology. Electronic MaterialsScience presents the fundamentals of the subject in a detailedfashion for a multidisciplinary audience. Offering a higher-leveltreatment than an undergraduate textbook provides, this textbenefits students and practitioners not only in electronics andoptical materials science, but also in additional cutting-edgefields like polymers and biomaterials. Readers with a basic understanding of physical chemistry or physicswill appreciate the text's sophisticated presentation of today'smaterials science. Instructive derivations of important formulae,usually omitted in an introductory text, are included here. Thisfeature offers a useful glimpse into the foundations of how thediscipline understands such topics as defects, phase equilibria,and mechanical properties. Additionally, concepts such asreciprocal space, electron energy band theory, and thermodynamicsenter the discussion earlier and in a more robust fashion than inother texts. Electronic Materials Science also features: * An orientation towards industry and academia drawn from theauthor's experience in both arenas * Information on applications in semiconductors, optoelectronics,photocells, and nanoelectronics * Problem sets and important references throughout * Flexibility for various pedagogical needs Treating the subject with more depth than any other introductorytext, Electronic Materials Science prepares graduate andupper-level undergraduate students for advanced topics in thediscipline and gives scientists in associated disciplines a clearreview of the field and its leading technologies.
With one or two exceptions, the materials dealt with are all active materials those involved in the processing of signals in a way that depends crucially on some specific property of those materials. The types of signals considered include optical as well as electronic functions, and also chemical s
This book brings together selected contributions both on the fundamental information on the physics and chemistry of these materials, new physical ideas and decisive experiments. It constitutes both an insightful treatise and a handy reference for specialists and graduate students working in solid state physics and chemistry, material science and related fields.
Mechanical and thermal properties are reviewed and electrical and magnetic properties are emphasized. Basics of symmetry and internal structure of crystals and the main properties of metals, dielectrics, semiconductors, and magnetic materials are discussed. The theory and modern experimental data are presented, as well as the specifications of materials that are necessary for practical application in electronics. The modern state of research in nanophysics of metals, magnetic materials, dielectrics and semiconductors is taken into account, with particular attention to the influence of structure on the physical properties of nano-materials. The book uses simplified mathematical treatment of theories, while emphasis is placed on the basic concepts of physical phenomena in electronic materials. Most chapters are devoted to the advanced scientific and technological problems of electronic materials; in addition, some new insights into theoretical facts relevant to technical devices are presented. Electronic Materials is an essential reference for newcomers to the field of electronics, providing a fundamental understanding of important basic and advanced concepts in electronic materials science. Provides important overview of the fundamentals of electronic materials properties significant for device applications along with advanced and applied concepts essential to those working in the field of electronics Takes a simplified and mathematical approach to theories essential to the understanding of electronic materials and summarizes important takeaways at the end of each chapter Interweaves modern experimental data and research in topics such as nanophysics, nanomaterials and dielectrics
In early 1987 I was attempting to develop a CVD-based tungsten process for Intel. At every step ofthe development, information that we were collecting had to be analyzed in light of theories and hypotheses from books and papers in many unrelated subjects. Thesesources were so widely different that I came to realize there was no unifying treatment of CVD and its subprocesses. More interestingly, my colleagues in the industry were from many disciplines (a surface chemist, a mechanical engineer, a geologist, and an electrical engineer werein my group). To help us understand the field of CVD and its players, some of us organized the CVD user's group of Northern California in 1988. The idea for writing a book on the subject occurred to me during that time. I had already organized my thoughts for a course I taught at San Jose State University. Later Van Nostrand agreed to publish my book as a text intended for students at the senior/first year graduate level and for process engineers in the microelectronics industry, This book is not intended to be bibliographical, and it does not cover every new material being studied for chemical vapor deposition. On the other hand, it does present the principles of CVD at a fundamental level while uniting them with the needs of the microelectronics industry.
This book describes semiconductors from a materials science perspective rather than from condensed matter physics or electrical engineering viewpoints. It includes discussion of current approaches to organic materials for electronic devices. It further describes the fundamental aspects of thin film nucleation and growth, and the most common physical and chemical vapor deposition techniques. Examples of the application of the concepts in each chapter to specific problems or situations are included, along with recommended readings and homework problems.
