Handbook of Thin Film Deposition

Handbook of Thin Film Deposition

Author: Krishna Seshan

Publisher: William Andrew

Published: 2012-12-06

Total Pages: 411

ISBN-13: 1437778747

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The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. - A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications - Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries - The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics - Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM - Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned 'Moore's Law' relating to the technology development cycle in the semiconductor industry


Silicon-on-Insulator Technology and Devices 14

Silicon-on-Insulator Technology and Devices 14

Author: Yasuhisa Omura

Publisher: The Electrochemical Society

Published: 2009

Total Pages: 357

ISBN-13: 1566777127

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This issue of ECS Transactions contains papers on silicon-on-insulator subjects including devices, device physics, modelling, simulations, microelectronics, photonics, nano-technology, integrated circuits, radiation hardness, material characterization, reliability, and sensors


Sinep 2009. 1st International Workshop on Si Based Nano-Electronics and -Photonics

Sinep 2009. 1st International Workshop on Si Based Nano-Electronics and -Photonics

Author: Steafno Chiussi

Publisher: Netbiblo

Published: 2009-06

Total Pages: 162

ISBN-13: 8497454162

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The main objective of this International Workshop in Vigo is to target this major problem by bringing together scientists and engineers specialized on various different topics related to group IV semiconductors. In five consecutive sessions dedicated to - Group IV materials: CMOS and further extension of the roadmap - Group IV materials: Nano-photonics - Material aspects and characterization on nano-scale - Nanostructures and material processing on atomic scale


Raman Imaging

Raman Imaging

Author: Arnaud Zoubir

Publisher: Springer

Published: 2012-07-27

Total Pages: 388

ISBN-13: 3642282520

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Raman imaging has long been used to probe the chemical nature of a sample, providing information on molecular orientation, symmetry and structure with sub-micron spatial resolution. Recent technical developments have pushed the limits of micro-Raman microscopy, enabling the acquisition of Raman spectra with unprecedented speed, and opening a pathway to fast chemical imaging for many applications from material science and semiconductors to pharmaceutical drug development and cell biology, and even art and forensic science. The promise of tip-enhanced raman spectroscopy (TERS) and near-field techniques is pushing the envelope even further by breaking the limit of diffraction and enabling nano-Raman microscopy.


Metrology and Diagnostic Techniques for Nanoelectronics

Metrology and Diagnostic Techniques for Nanoelectronics

Author: Zhiyong Ma

Publisher: CRC Press

Published: 2017-03-27

Total Pages: 889

ISBN-13: 135173394X

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Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore’s law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.


4D Visualization of Matter

4D Visualization of Matter

Author: Ahmed H Zewail

Publisher: World Scientific Publishing Company

Published: 2014-09-12

Total Pages: 426

ISBN-13: 1783265043

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Ever since the beginning of mankind's efforts to pursue scientific inquiry into the laws of nature, visualization of the very distant and the very small has been paramount. The examples are numerous. A century ago, the atom appeared mysterious, a “raisin or plum pie of no structure,” until it was visualized on the appropriate length and time scales. Similarly, with telescopic observations, a central dogma of the cosmos was changed and complexity yielded to simplicity of the heliocentric structure and motion in our solar system. For matter, in over a century of developments, major advances have been made to explore the inner microscopic structures and dynamics. These advances have benefited many fields of endeavor, but visualization was incomplete; it was limited either to the 3D spatial structure or to the 1D temporal evolution. However, in systems with myriads of atoms, 4D spatiotemporal visualization is essential for dissecting their complexity. The biological world is rich with examples, and many molecular diseases cannot be fully understood without such direct visualization, as, for example, in the case of Alzheimer's and Parkinson's. The same is true for phenomena in materials science, chemistry, and nanoscience. This anthology is an account of the collected works that have emerged over the past decade from Caltech. Through recent publications, the volume provides overviews of the principles, the electron-based techniques, and the applications made. Thanks to advances in imaging principles and technology, it is now possible with 4D electron microscopy to reach ten orders of magnitude improvement in time resolution while simultaneously conserving the atomic spatial resolution in visualization. This is certainly a long way from Robert Hooke's microscopy, which was recorded in his 1665 masterpiece Micrographia.


Monolithic Nanoscale Photonics-Electronics Integration in Silicon and Other Group IV Elements

Monolithic Nanoscale Photonics-Electronics Integration in Silicon and Other Group IV Elements

Author: Henry Radamson

Publisher: Academic Press

Published: 2014-09-17

Total Pages: 183

ISBN-13: 0124199968

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Silicon technology is evolving rapidly, particularly in board-to-board or chip-to chip applications. Increasingly, the electronic parts of silicon technology will carry out the data processing, while the photonic parts take care of the data communication. For the first time, this book describes the merging of photonics and electronics in silicon and other group IV elements. It presents the challenges, the limitations, and the upcoming possibilities of these developments. The book describes the evolution of CMOS integrated electronics, status and development, and the fundamentals of silicon photonics, including the reasons for its rapid expansion, its possibilities and limitations. It discusses the applications of these technologies for such applications as memory, digital logic operations, light sources, including drive electronics, optical modulators, detectors, and post detector circuitry. It will appeal to engineers in the fields of both electronics and photonics who need to learn more about the basics of the other field and the prospects for the integration of the two. - Combines the topics of photonics and electronics in silicon and other group IV elements - Describes the evolution of CMOS integrated electronics, status and development, and the fundamentals of silicon photonics