Capture Pumping Technology
Capture Pumping Technology

Author: K. Welch

Publisher: Elsevier

Published: 2001-10-11

Total Pages: 384

ISBN-13: 9780444508829

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This is a practical textbook written for use by engineers, scientists and technicians. It is not intended to be a rigorous scientific treatment of the subject material, as this would fill several volumes. Rather, it introduces the reader to the fundamentals of the subject material, and provides sufficient references for an in-depth study of the subject by the interested technologist. The author has a lifetime teaching credential in the California Community College System. Also, he has taught technical courses with the American Vacuum Society for about 35 years. Students attending many of these classes have backgrounds varying from high-school graduates to Ph.D.s in technical disciplines. This is an extremely difficult class profile to teach. This book still endeavors to reach this same audience. Basic algebra is required to master most of the material. But, the calculus is used in derivation of some of the equations. The author risks use of the first person I, instead of the author, and you instead of the reader. Both are thought to be in poor taste when writing for publication in the scientific community. However, I am writing this book for you because the subject is exciting, and I enjoy teaching you, perhaps, something new. The book is written more in the vein of a one-on-one discussion with you, rather than the author lecturing to the reader. There are anecdotes, and examples of some failures and successes I have had over the last forty-five years in vacuum related activities, I'll try not to understate either. Lastly, there are a few equations which if memorised will help you as a vacuum technician. There are less than a dozen equations and half that many rules of thumb to memorize, which will be drawn on time an again in designing, operating and trouble-shooting any vacuum system.

Capture Pumping Technology: An Introduction
Capture Pumping Technology: An Introduction

Author: Kimo M. Welch

Publisher: Pergamon

Published: 1991-09-16

Total Pages: 384

ISBN-13:

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Capture Pumping Technology: An Introduction is a practical book for students, technicians, scientists and engineers involved in the field. The author has drawn upon his vast experience in vacuum-related technologies to provide an introduction to the fundamentals of the subject. The book is written in an easy-to-read style based on a one-to-one discussion, and offers a selection of common problems at the end of each chapter. With chapters on basic theory, sputter-ion pumping, titanium sublimation pumping, nonevaporable getters, and cryopumping, the book makes an excellent introductory text.

Cryopumping
Cryopumping

Author: René A. Haefer

Publisher: Oxford University Press, USA

Published: 1989

Total Pages: 464

ISBN-13:

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This book covers the physical theory, practical techniques, and applications of cryopumping--the production of a vacuum through the use of low temperatures. The importance of this technique has increased greatly in recent years due to the proliferation of new uses and the demand in many vacuum procedures for ultraclean gas atmospheres, low final pressures, and high specific pumping speeds. The author reviews recent developments that have resulted in safer pumps that allow full automation and that are superior to conventional pumps in installation and operation costs.

Introduction to Microfabrication
Introduction to Microfabrication

Author: Sami Franssila

Publisher: John Wiley & Sons

Published: 2005-01-28

Total Pages: 424

ISBN-13: 0470020563

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Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.

Vacuum Deposition onto Webs, Films and Foils
Vacuum Deposition onto Webs, Films and Foils

Author: Charles Bishop

Publisher: William Andrew

Published: 2015-08-15

Total Pages: 603

ISBN-13: 0323296904

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Vacuum Deposition onto Webs: Films and Foils, Third Edition, provides the latest information on vacuum deposition, the technology that applies an even coating to a flexible material that can be held on a roll, thereby offering a much faster and cheaper method of bulk coating than deposition onto single pieces or non-flexible surfaces such as glass. This technology has been used in industrial-scale applications for some time, including a wide range of metalized packaging. Its potential as a high-speed, scalable process has seen an increasing range of new products emerging that employ this cost-effective technology, including solar energy products that are moving from rigid panels onto cheaper and more versatile flexible substrates, flexible electronic circuit 'boards', and flexible displays. In this third edition, all chapters are thoroughly revised with a significant amount of new information added, including newly developed barrier measurement techniques, improved in-vacuum monitoring technologies, and the latest developments in Atomic Layer Deposition (ALD). - Provides the know-how to maximize productivity of vacuum coating systems - Thoroughly revised with a significant amount of new information added, including newly developed barrier measurement techniques, improved in-vacuum monitoring technologies, and the latest on Atomic Layer Deposition (ALD) - Presents the latest information on vacuum deposition, the technology that applies an even coating to a flexible material that can be held on a roll, thereby offering a much faster and cheaper method of bulk coating - Enables engineers to specify systems more effectively and enhances dialogue between non-specialists and suppliers/engineers - Empowers those in rapidly expanding fields such as solar energy, display panels, and flexible electronics to unlock the potential of vacuum coating to transform their processes and products

Handbook of Vacuum Technology
Handbook of Vacuum Technology

Author: Karl Jousten

Publisher: John Wiley & Sons

Published: 2016-07-05

Total Pages: 1050

ISBN-13: 3527688242

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This comprehensive, standard work has been updated to remain an important resource for all those needing detailed knowledge of the theory and applications of vacuum technology. The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross-linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user-friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment-related data, national and international standards, guidelines, and much more. As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.

Handbook of Vacuum Technology
Handbook of Vacuum Technology

Author: Karl Jousten

Publisher: John Wiley & Sons

Published: 2016-06-14

Total Pages: 1050

ISBN-13: 3527688250

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This comprehensive, standard work has been updated to remain an important resource for all those needing detailed knowledge of the theory and applications of vacuum technology. The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross-linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user-friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment-related data, national and international standards, guidelines, and much more. As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.

Handbook of Vacuum Science and Technology
Handbook of Vacuum Science and Technology

Author: Dorothy Hoffman

Publisher: Elsevier

Published: 1997-10-29

Total Pages: 861

ISBN-13: 0080533752

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The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner. - User oriented with many useful tables, charts, and figures of use to the practitioner - Reviews new vacuum materials and equipment - Illustrates the design and maintenance of modern vacuum systems - Includes well referenced chapters

A User's Guide to Vacuum Technology
A User's Guide to Vacuum Technology

Author: John F. O'Hanlon

Publisher: John Wiley & Sons

Published: 2005-02-18

Total Pages: 536

ISBN-13: 0471467154

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In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.