Advances in Low Temperature Rf Plasmas

Advances in Low Temperature Rf Plasmas

Author: Toshiaki Makabe

Publisher: Elsevier Publishing Company

Published: 2002

Total Pages: 0

ISBN-13: 9780444510952

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Low temperature plasmas have had a very broad range of applications ever since their discovery. However, recent developments in the dextrous handling of dry etching non-equilibrium plasma have attracted a great common interest that has driving force behind the major developments in diagnostic, theoretical and numerical techniques since the 1980s. A greater fundamental understanding of the kinetics of radio-frequency (rf) plasmas and their interaction with surfaces in regard to the process of large scale integrated circuits has been achieved through the cooperation between academia and industry. At the same time, new applications have become possible, and the basic understanding of low temperature rf plasmas has diffused to other areas of plasma physics. in the special issue of Applied Surface Science, which is published in memory of the International Workshop on Basis for Low Temperature Plasma Applications at Hakone in Japan on July 24 - 25 of 2001. The basic goal in the selection of topics was to cover the range of issues that represent the building blocks of the complex, vertically integrated plasma simulation schemes including surface processes. The text also shows examples of integrated codes and how they are implemented in the development of new strategies of plasma processing. Such codes may be used both in modern experiments and in the computer aided design and control of the plasma devices of the next generation. These are based on the transport theory of electrons, ions and neutrals, as well as on numerical modellings and on the available collision and transport data describing gas and surface phases. density plasmas. All the chapters present a relatively complete review of the developments in these fields since the 1980s as well as a review of their status of development in 2002, and there is a blend of research reviews from both academia and industry.


Theory of Low-Temperature Plasma Physics

Theory of Low-Temperature Plasma Physics

Author: Shi Nguyen-Kuok

Publisher: Springer

Published: 2016-11-11

Total Pages: 508

ISBN-13: 3319437216

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This book offers the reader an overview of the basic approaches to the theoretical description of low-temperature plasmas, covering numerical methods, mathematical models and modeling techniques. The main methods of calculating the cross sections of plasma particle interaction and the solution of the kinetic Boltzmann equation for determining the transport coefficients of the plasma are also presented. The results of calculations of thermodynamic properties, transport coefficients, the equilibrium particle-interaction cross sections and two-temperature plasmas are also discussed. Later chapters consider applications, and the results of simulation and calculation of plasma parameters in induction and arc plasma torches are presented. The complex physical processes in high-frequency plasmas and arc plasmas, the internal and external parameters of plasma torches, near-electrode processes, heat transfer, the flow of solid particles in plasmas and other phenomena are considered. The book is intended for professionals involved in the theoretical study of low-temperature plasmas and the design of plasma torches, and will be useful for advanced students in related areas.


Advanced Plasma Technology

Advanced Plasma Technology

Author: Riccardo d'Agostino

Publisher: John Wiley & Sons

Published: 2008-09-08

Total Pages: 479

ISBN-13: 3527622195

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A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics, dust control, and etching. The section on application technology covers polymer treatments, silicon solar cell, coating and spray, biomaterials, sterilization and waste treatment, plasma propulsion, plasma display panels, and anti-corrosion coatings. The result is an indispensable work for physicists, chemists and engineers involved in the field of plasma technology.


Emerging Developments and Applications of Low Temperature Plasma

Emerging Developments and Applications of Low Temperature Plasma

Author: Shahzad, Aamir

Publisher: IGI Global

Published: 2021-12-17

Total Pages: 239

ISBN-13: 1799884007

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Low temperature plasma in medicine is a new field that rose from the research in the application of cold plasmas in bioengineering. Plasma medicine is an innovative and promising multidisciplinary novel field of research covering plasma physics, life sciences, and clinical medicine to apply physical plasma for therapeutic applications. Emerging Developments and Applications of Low Temperature Plasma explores all areas of experimental, computational, and theoretical study of low temperature and atmospheric plasmas and provides a collection of exciting new research on the fundamental aspects of low temperature and pressure plasmas and their applications. Covering topics such as carbon nanotubes, foodborne pathogens, and plasma formation, this book is an essential resource for research groups, plasma-based industries, plasma aerodynamics industries, metal and cutlery industries, medical institutions, researchers, and academicians.


Advancements in Fine Particle Plasmas

Advancements in Fine Particle Plasmas

Author: Aamir Shahzad

Publisher: BoD – Books on Demand

Published: 2024-03-13

Total Pages: 80

ISBN-13: 1837697906

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This book summarizes the most significant advancements of plasma science in allied technologies. It highlights the most recent developments and important advances in plasma science and technology. It is important for all civilizations to use more cost-effective and eco-friendly plasma technology for industrial, clinical/biotechnology, wastewater, and agricultural applications. Traditional techniques are not effective, and thus, this book examines the challenges that must be solved before novel plasma technology can be successfully used in the future. It also examines aspects of fine particle plasmas, including their fundamental physics, mechanisms, design, allied technologies, and novel methods. The most promising plasma-based devices and nano-plasmas allow us to change approaches in industries such as medicine and agriculture due to their thermophysical (transport and thermodynamics), wave behaviors, as well as external electric and magnetic, acoustic, light, temperature, and other properties. This book highlights recent advances in energy materials, semiconductor systems, plasma medicine, agricultural plasma and food processing, green plasma fusion energy, space science, plasma technology for the conversion of CO2, green energy, and more. Moreover, it examines plasma technology as a key advancement in modern medicine and health care.


Plasma Electronics

Plasma Electronics

Author: Toshiaki Makabe

Publisher: CRC Press

Published: 2006-03-27

Total Pages: 355

ISBN-13: 1420012274

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Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,


Plasma Electronics, Second Edition

Plasma Electronics, Second Edition

Author: Toshiaki Makabe

Publisher: CRC Press

Published: 2014-08-27

Total Pages: 414

ISBN-13: 1482222051

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Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods required to bring these technologies from the laboratory to the factory. Emphasizing computational algorithms and techniques, this updated edition of a popular monograph supplies a complete and up-to-date picture of plasma physics, computational methods, applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. A helpful resource for anyone learning about collisional plasma structure, function, and applications, this edition reflects the latest progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process. Filled with new figures, tables, problems, and exercises, it includes a new chapter on the development of atmospheric-pressure plasma, in particular microcell plasma, with a discussion of its practical application to improve surface efficiency. The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor. Integrating physics, numerical methods, and practical applications, this book equips you with the up-to-date understanding required to scale up lab breakthroughs into industrial innovations.


Low Temperature Plasma Technology

Low Temperature Plasma Technology

Author: Paul K. Chu

Publisher: CRC Press

Published: 2013-07-15

Total Pages: 497

ISBN-13: 1466509902

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Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration into biofilms, discharge-mode transition of atmospheric pressure plasmas, and self-organization of microdischarges. It describes relevant technology and diagnostics, including nanosecond pulsed discharge, cavity ringdown spectroscopy, and laser-induced fluorescence measurement, and explores the increasing research on atmospheric pressure nonequilibrium plasma jets. The authors also discuss how low temperature plasmas are used in the synthesis of nanomaterials, environmental applications, the treatment of biomaterials, and plasma medicine. This book provides a balanced and thorough treatment of the core principles, novel technology and diagnostics, and state-of-the-art applications of low temperature plasmas. It is accessible to scientists and graduate students in low-pressure plasma physics, nanotechnology, plasma medicine, and materials science. The book is also suitable as an advanced reference for senior undergraduate students.


Physics of Radio-Frequency Plasmas

Physics of Radio-Frequency Plasmas

Author: Pascal Chabert

Publisher: Cambridge University Press

Published: 2011-02-24

Total Pages: 392

ISBN-13: 9780521763004

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Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.