This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high.a Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc.Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis.The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices."
Acoustics is a mature field which enjoys a never ending youth. New developments are induced by either the search for a better understanding, or by technological innovations. Micro-fabrication techniques introduced a whole new class of microdevices, which exploit acoustic waves for various tasks, and in particular for information processing and for sensing purposes. Performance improvements are achievable by better modelling tools, able to deal with more complex configurations, and by more refined techniques of fabrication and of integration in technological systems, like wireless communications. Several chapters of this book deal with modelling and fabrication techniques for microdevices, including unconventional phenomena and configurations. But this is far from exhausting the research lines in acoustics. Theoretical analyses and modelling techniques are presented, for phenomena ranging from the detection of cracks to the acoustics of the oceans. Measurement methods are also discussed, which probe by acoustic waves the properties of widely different systems.
Measurement is a multidisciplinary experimental science. Measurement systems synergistically blend science, engineering and statistical methods to provide fundamental data for research, design and development, control of processes and operations, and facilitate safe and economic performance of systems. In recent years, measuring techniques have expanded rapidly and gained maturity, through extensive research activities and hardware advancements. With individual chapters authored by eminent professionals in their respective topics, Applied Measurement Systems attempts to provide a comprehensive presentation and in-depth guidance on some of the key applied and advanced topics in measurements for scientists, engineers and educators.
Radio-frequency (RF) integrated circuits in CMOS technology are gaining increasing popularity in the commercial world, and CMOS technology has become the dominant technology for applications such as GPS receivers, GSM cellular transceivers, wireless LAN, and wireless short-range personal area networks based on IEEE 802.15.1 (Bluetooth) or IEEE 802.15.4 (ZigBee) standards. Furthermore, the increasing interest in wireless technologies and the widespread of wireless communications has prompted an ever increasing demand for radio frequency transceivers. Wireless Radio-Frequency Standards and System Design: Advanced Techniques provides perspectives on radio-frequency circuit and systems design, covering recent topics and developments in the RF area. Exploring topics such as LNA linearization, behavioral modeling and co-simulation of analog and mixed-signal complex blocks for RF applications, integrated passive devices for RF-ICs and baseband design techniques and wireless standards, this is a comprehensive reference for students as well as practicing professionals.
Solid Acoustic Waves and Vibration: Theory and Applications is an exciting new book that takes readers inside a fascinating subject. It is charming that there is a complex and delicate structure in characteristic values, which is revealed by introducing a conceptual system including space operator, space-time variable, reference Poisson's ratio, etc., and developing the analytical models for all limiting cases. The dispersion curves of waves in an elastic plate are determined completely, and a systematic and concise description of the fundamental theory of this subject is given.As MEMS and NEMS technology develops, a number of new issues presents, such as the effects of residual stress, thin-film, air captured in micro-air-gaps and coating on the system, which make the problem complicated and spark debates. Micro-diaphragms are modeled by a plate in tension and mounted on air-spring, a general TDK equation of vibration of plates, including free, forced and damped vibrations, and its solutions are developed. The loading effect of coating is modeled by a mass load; a micro-load theory is presented. This book is a summary of the author's long-term research on electromechanical transducers and these related issues, and they provide an excellent description combining theory and application. The principle of electromechanical transducers, which achieve the conversion between mechanical and electrical energy, occupying a particularly important position in the field of robotics and intelligent machines, is elucidated by introducing the concepts of space-time operator, complex transformation factor, inversion impedance, etc., and an unfiled equivalent circuit is presented. The applications in micromachined capacitive ultrasonic transducers (mCUTs, CMUTs) for biomedical imaging and ultrasonic mass resonators (mUMRs) for biochemical sensing, including plate-type, beam-type, nanowire, bulk-wave, LAW and SAW delay-line ultrasonic resonators are described. This interdisciplinary book will be increasingly attractive as MEMS and NEMS technology develops.
Interest in filter theory and design has been growing with the telecommunications industry since the late nineteenth century. Now that telecommunications has become so critical to industry, filter research has assumed even greater importance at companies and academic institutions around the world. The CRC Handbook of Electrical Filters fills in the gaps for engineers and scientists who need a basic introduction to the subject. Unlike the currently available textbooks, which are filled with detailed, highly technical analysis geared to the specialist, this practical guide provides useful information for the non-specialist about the various types of filters, their design, and applications. The handbook covers approximation theory and methods and introduces CAD packages that perform approximation and synthesis for both analog and digital filters. Also included are design methods for LCR, active-RC, digital, mechanical, and switched capacitor (SC) filters. A thorough survey of current design trends rounds out this complete assessment of a key field of study.
The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
Surface acoustic wave (SAW) devices are widely used in mobile communications, a rapidly evolving market. This book gives an overview on the latest SAW technologies with an emphasis on the design and simulation of devices, such as resonator-based devices employing the SH-type leaky SAW.
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
