A combination of original material and reprints, this text explains vacuum mechanism design, control, components and applications including automated systems and robotics.
Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives. This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS. As well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this book includes an overview of systems engineering, optics and precision measurement systems, in an attempt to establish a connection between these fields under one umbrella. Robert Munnig Schmidt is professor in Mechatronic System Design at Delft University of Technology with industrial experience at Philips and ASML in research and development of consumer and high-tech systems. He is also director of RMS Acoustics & Mechatronics, doing research and development on active controlled low frequency sound systems. Georg Schitter is professor at the Automation and Control Institute (ACIN) at Vienna University of Technology with a standing track record in research on the control and mechatronic design of extremely fast precision motion systems such as video rate AFM systems. Adrian Rankers is managing partner of Mechatronics Academy, developing and delivering high level courses to the industrial community, based on industrial experience at Philips in the research and development of consumer and high-tech systems. Jan van Eijk is emeritus professor in Advanced Mechatronics at Delft University of Technology. He is also director of MICE BV and partner at Mechatronics Academy, acting as industrial R&D advisor and teacher with experience at Philips in the research and development of consumer and high-tech systems.
Mechatronics is today fast developing as an interdisciplinary branch of engineering. This book offers a comprehensive coverage of the design and application of mechatronic systems. It discusses in detail the construction, operation, features and applications of various components of mechatronic systems. The text, profusely illustrated with diagrams, emphasizes the readers’ multidisciplinary skills and ability to design and maintain different mechatronic systems. Key Features : • Motivational assignments given at the end of each chapter and the Case Studies provided at the end of the book direct the readers to applications of mechatronics concepts in the real-world problems encountered in engineering practice. • Separate chapters are devoted to the advanced topics of Robotics and Microelectromechanical Systems (MEMS). • The text is supported by a fair number of photographs of mechatronic systems and their components. This student-friendly text is primarily intended for the students of undergraduate and diploma courses in mechanical, electronics, industrial, and mechatronics engineering. It will also be of immense use to practising engineers.
Since they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives. This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS. As well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this book includes an overview of systems engineering, optics and precision measurement systems, in an attempt to establish a connection between these fields under one umbrella. Robert Munnig Schmidt is emeritus professor in Mechatronic System Design at Delft University of Technology with industrial experience at Philips and ASML in research and development of consumer and high-tech systems. He is also director of RMS Acoustics & Mechatronics, doing research and development on active controlled low frequency sound systems. Georg Schitter is professor at the Automation and Control Institute (ACIN) at Vienna University of Technology with a standing track record in research on the control and mechatronic design of extremely fast precision motion systems such as video rate AFM systems. Adrian Rankers is managing partner of Mechatronics Academy, developing and delivering high level courses to the industrial community, based on industrial experience at Philips in the research and development of consumer and high-tech systems. He also teaches Mechatronics at the Eindhoven University of Technology. Jan van Eijk is emeritus professor in Advanced Mechatronics at Delft University of Technology. He is also director of MICE BV and partner at Mechatronics Academy, acting as industrial R&D advisor and teacher with experience at Philips in the research and development of consumer and high-tech systems.
Mechatronics has evolved into a way of life in engineering practice, and it pervades virtually every aspect of the modern world. In chapters drawn from the bestselling and now standard engineering reference, The Mechatronics Handbook, this book introduces the vibrant field of mechatronics and its key elements: physical system modeling; sensors and actuators; signals and systems; computers and logic systems; and software and data acquisition. These chapters, written by leading academics and practitioners, were carefully selected and organized to provide an accessible, general outline of the subject ideal for non-specialists. Mechatronics: An Introduction first defines and organizes the key elements of mechatronics, exploring design approach, system interfacing, instrumentation, control systems, and microprocessor-based controllers and microelectronics. It then surveys physical system modeling, introducing MEMS along with modeling and simulation. Coverage then moves to essential elements of sensors and actuators, including characteristics and fundamentals of time and frequency, followed by control systems and subsystems, computer hardware, logic, system interfaces, communication and computer networking, data acquisition, and computer-based instrumentation systems. Clear explanations and nearly 200 illustrations help bring the subject to life. Providing a broad overview of the fundamental aspects of the field, Mechatronics: An Introduction is an ideal primer for those new to the field, a handy review for those already familiar with the technology, and a friendly introduction for anyone who is curious about mechatronics.
This comprehensive, standard work has been updated to remain an important resource for all those needing detailed knowledge of the theory and applications of vacuum technology. The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross-linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user-friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment-related data, national and international standards, guidelines, and much more. As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.
An Up-To-Date Reference on the Latest Developments of MechatronicsGeared toward engineers, designers, researchers, educators, and students, Mechatronics: Fundamentals and Applications focuses on integrating practice with theory relevant to electromechanical and multidomain systems. A result of the Distinguished Visiting Fellowship of the Royal Acad