Silicon Devices
Silicon Devices

Author: Kenneth A. Jackson

Publisher: John Wiley & Sons

Published: 2008-11-21

Total Pages: 210

ISBN-13: 3527611797

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Silicon is the most important material for the electronics industry. In modern microelectronics silicon devices like diodes and transistors play a major role, and devices like photodetectors or solar cells gain ever more importance. This concise handbook deals with one of the most important topics for the electronics industry. World renowned authors have contributed to this unique overview of the processing of silicon and silicon devices.

Rapid Thermal Processing
Rapid Thermal Processing

Author: Richard B. Fair

Publisher: Academic Press

Published: 2012-12-02

Total Pages: 441

ISBN-13: 0323139809

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This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

ULSI Technology
ULSI Technology

Author: C. Y. Chang

Publisher: McGraw-Hill Science, Engineering & Mathematics

Published: 1996

Total Pages: 756

ISBN-13:

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"This text follows the tradition of Sze's highly successful pioneering text on VLSI technology and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. Contributing to each chapter are industry experts, specializing in topics such as epitaxy with low temperature process, rapid thermal processes, low damage plasma reactive ion etching, fine line litography, cleaning technology, clean room technology, packing and reliability."--