ULSI Process Integration 6
ULSI Process Integration 6

Author: C. Claeys

Publisher: The Electrochemical Society

Published: 2009-09

Total Pages: 547

ISBN-13: 1566777445

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ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate stacks, shallow junctions, dry etching, etc.), 3) Back-end-of-line integration (CMP, low-k, Cu interconnect, air-gaps, 3D packaging, etc.), 4) Alternative channel technologies (Ge, III-V, hybrid integration), and 5) Emerging technologies (CNT, graphene, polymer electronics, nanotubes).

ULSI Process Integration 5
ULSI Process Integration 5

Author: Cor L. Claeys

Publisher: The Electrochemical Society

Published: 2007

Total Pages: 509

ISBN-13: 1566775728

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The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.

Microelectronics, Microsystems and Nanotechnology
Microelectronics, Microsystems and Nanotechnology

Author: Androula G. Nassiopoulou

Publisher: World Scientific

Published: 2001

Total Pages: 409

ISBN-13: 9810247699

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This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.

Microelectronics, Microsystems And Nanotechnology: Papers Presented Of At Mmn 2000
Microelectronics, Microsystems And Nanotechnology: Papers Presented Of At Mmn 2000

Author: Androula G Nassiopoulou

Publisher: World Scientific

Published: 2001-10-19

Total Pages: 409

ISBN-13: 9814489999

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This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.