This book provides a complete overview of thin film resistive sensors.devoted to thin-film devices. Each type of input energy is discussed in a separate chapter. Detailed descriptions are given of the materials, properties, structure and principles of operation of the sensors as well as their main applications. Results of the authors' research and comprehensive reviews of the current literature are included. The scope of this book and its accessible style make it a valuable reference work to graduate scientists and engineers in many disciplines. Written for scientists and engineers using or developing thin film sensors.
Thin Film Magnetoresistive Sensors presents a comprehensive review of thin film magnetoresistive (MR) sensors, including the theory of MR effects as well as the design, fabrication, properties, and applications of MR sensors. With over 1,000 references, the book fully reviews the theory, development, and use of these sensors. It provides essential information about the performance of various kinds of sensors, including permalloy magnetoresistors, spin valve sensors, multilayer sensors, colossal effect sensors, spin dependent tunneling sensors, and magnetoimpedance sensors.
Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
This book discusses advances in functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.
Sensor technologies have experienced dramatic growth in recent years, making a significant impact on national security, health care, environmental improvement, energy management, food safety, construction monitoring, manufacturing and process control, and more. However, education on sensor technologies has not kept pace with this rapid development ... until now. Resistive, Capacitive, Inductive, and Magnetic Sensor Technologies examines existing, new, and novel sensor technologies and—through real-world examples, sample problems, and practical exercises—illustrates how the related science and engineering principles can be applied across multiple disciplines, offering greater insight into various sensors’ operating mechanisms and practical functions. The book assists readers in understanding resistive, capacitive, inductive, and magnetic (RCIM) sensors, as well as sensors with similar design concepts, characteristics, and circuitry. Resistive, Capacitive, Inductive, and Magnetic Sensor Technologies is a complete and comprehensive overview of RCIM sensing technologies. It takes a unique approach in describing a broad range of sensing technologies and their diverse applications by first reviewing the necessary physics, and then explaining the sensors’ intrinsic mechanisms, distinctive designs, materials and manufacturing methods, associated noise types, signal conditioning circuitry, and practical applications. The text not only covers silicon and metallic sensors but also those made of modern and specialized materials such as ceramics, polymers, and organic substances. It provides cutting-edge information useful to students, researchers, scientists, and practicing professionals involved in the design and application of sensor-based products in fields such as biomedical engineering, mechatronics, robotics, aerospace, and beyond.
As the definitive resource on position sensing technology, Understanding Position Sensors encompasses all aspects necessary for a full understanding of the field, with topics of background, operational theory, design, and application. While grasping the theory of technologies used in the measurement of linear and angular/rotary position sensors, the reader will also learn about terminology, interfacing, testing, and other valuable concepts that are useful in the understanding of sensors in general. The first three chapters provide readers with the necessary background information on sensors. These chapters review the working definitions and conventions used in sensing technology; specification of position sensors and the effect on performance; and sensor output types, plus an extensive section covering communication protocols. The remaining chapters describe each separate sensor technology in detail. These include resistive sensors, cable extension transducers, capacitive sensors, inductive sensors, LVDT and RVDT sensors, distributed impedance sensors, Hall effect sensors, magnetoresistive sensors, magnetostrictive sensors, linear and rotary encoders, optical triangulation position sensors, and ultrasonic position sensors. Presents sensor specification, theory of operation, sensor design, and application criteria Reviews the background history of position sensors as well as the underlying engineering techniques Includes end-of-chapter exercises Understanding Position Sensors is written for electrical, mechanical, and material engineers, as well as for engineering students who are interested in understanding sensor technologies, and can be used as a textbook for an engineering course on sensor technology.
A resource on position sensor technology, including background, operational theory, design and applications This book explains the theory and applications of the technologies used in the measurement of linear and angular/rotary position sensors. The first three chapters provide readers with the necessary background information on sensors. These chapters review: the working definitions and conventions used in sensing technology; the specifications of linear position transducers and sensors and how they affect performance; and sensor output types and communication protocols. The remaining chapters discuss each separate sensor technology in detail. These include resistive sensors, cable extension transducers, capacitive sensors, inductive sensors, LVDT and RVDT sensors, distributed impedance sensors, Hall Effect sensors, magnetoresistive sensors, magnetostrictive sensors, linear and rotary encoders, and optical triangulation position sensors. Discusses sensor specification, theory of operation, sensor design, and application criteria Reviews the background history of the linear and angular/rotary position sensors as well as the underlying engineering techniques Includes end-of-chapter exercises Position Sensors is written for electrical, mechanical, and material engineers as well as engineering students who are interested in understanding sensor technologies.
This title offers an overview of various sensors and sensor systems as required and applied in mechatronics. Emphasis lies on the physical background of the operating principles, illustrated with examples of commercially available sensors and of recent and future developments.
This book reports on the design, fabrication and characterization of a set of flexible electronic components, including on-foil sensors, organic thin-film transistors and ultra-thin chips. The core of the work is on showing how to combine high-performance integrated circuits with large-area electronic components on a single polymeric foil, to realize smart electronic systems for different applications, such as temperature, humidity and mechanical stress sensors. The book offers an extensive introduction to Hybrid System-in-Foil technology (HySiF), and related on-chip/on-foil passive and active components. It presents six case studies designed to highlight key HySiF challenges, together with the methodology to address those challenges. Last but not least, it describes the development of a reconfigurable, energy-efficient Analog-to-Digital Converter for HySiF. All in all, this book provides readers with extensive information on the state of the art in the design and characterization of integrated circuits and hybrid electronic systems on flexible polymeric substrates. By describing significant advances in organic thin-film transistor technology, this work is expected to pave the way to future developments in the area of energy-efficient smart sensors and integrated circuits.
Inspired by their many years of research collaboration, Stolarski (mechanical engineering, Brunel U., UK) and Tobe (Ashikaga Institute of Technology, Japan) have created this text with the aim of helping practicing designers, researchers, and postgraduate students (especially of engineering) to better understand, select, and design rolling contacts for mechanical devices and systems. The text presents the fundamentals of rolling friction, emphasizing the important engineering applications of rolling contacts. Applications described include rolling bearings, gears, road-tire and rail-wheel interactions, cam-tappet systems, and roll-forming of materials. Distributed by ASME. Annotation copyrighted by Book News, Inc., Portland, OR
