Semiconductor Material and Device Characterization
Semiconductor Material and Device Characterization

Author: Dieter K. Schroder

Publisher: John Wiley & Sons

Published: 2015-06-29

Total Pages: 800

ISBN-13: 0471739065

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This Third Edition updates a landmark text with the latest findings The Third Edition of the internationally lauded Semiconductor Material and Device Characterization brings the text fully up-to-date with the latest developments in the field and includes new pedagogical tools to assist readers. Not only does the Third Edition set forth all the latest measurement techniques, but it also examines new interpretations and new applications of existing techniques. Semiconductor Material and Device Characterization remains the sole text dedicated to characterization techniques for measuring semiconductor materials and devices. Coverage includes the full range of electrical and optical characterization methods, including the more specialized chemical and physical techniques. Readers familiar with the previous two editions will discover a thoroughly revised and updated Third Edition, including: Updated and revised figures and examples reflecting the most current data and information 260 new references offering access to the latest research and discussions in specialized topics New problems and review questions at the end of each chapter to test readers' understanding of the material In addition, readers will find fully updated and revised sections in each chapter. Plus, two new chapters have been added: Charge-Based and Probe Characterization introduces charge-based measurement and Kelvin probes. This chapter also examines probe-based measurements, including scanning capacitance, scanning Kelvin force, scanning spreading resistance, and ballistic electron emission microscopy. Reliability and Failure Analysis examines failure times and distribution functions, and discusses electromigration, hot carriers, gate oxide integrity, negative bias temperature instability, stress-induced leakage current, and electrostatic discharge. Written by an internationally recognized authority in the field, Semiconductor Material and Device Characterization remains essential reading for graduate students as well as for professionals working in the field of semiconductor devices and materials. An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department.

Handbook of Silicon Based MEMS Materials and Technologies
Handbook of Silicon Based MEMS Materials and Technologies

Author: Markku Tilli

Publisher: William Andrew

Published: 2015-09-02

Total Pages: 827

ISBN-13: 0323312233

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The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures - Geared towards practical applications rather than theory

Characterization of Materials, 2 Volume Set
Characterization of Materials, 2 Volume Set

Author: Elton N. Kaufmann

Publisher: Wiley-Interscience

Published: 2003-01-31

Total Pages: 696

ISBN-13:

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Characterization of Materials (formerly Methods in Materials Research) provides comprehensive up-to-date coverage of materials characterization techniques including computational and theoretical methods as well as crystallography, mechanical testing, thermal analysis, optical imaging and spectroscopy, and more. Editor-in-Chief, Elton Kaufmann, Ph.D. is Associate Director of the Strategic Planning Group at the Argonne National Laboratory and has published approximately 100 technical papers in refereed journals and books. Dr. Kaufmann has assembled leading experts from academia, government, and industry to provide: A comprehensive up-to-date collection of methods used in the characterization of materials Articles on various methods from standard to cutting edge Periodic online updates to keep pace with latest developments A user-friendly format that is easy and simple to search and navigate Characterization of Materials is a collection of characterization methods that is widely applicable in the wide and diverse field of materials research irrespective of discipline or ultimate application and with which researchers, engineers, and educators must have familiarity. Methods covered include: General Vacuum Techniques X-Ray Powder Diffraction High Strain Rate Testing Deep Level Transient Spectroscopy Cyclic Voltammetry Extended X-Ray Absorption Fine Structure Low Energy Electron Diffraction Thermogravimetric Analysis Magnetometry Transmission Electron Microscopy Ultraviolet Photoelectron Spectroscopy This reference work is also available as a convenient online edition. For information regarding the online edition, please visit: www.mrw.interscience.wiley.com/com

Characterization in Compound Semiconductor Processing
Characterization in Compound Semiconductor Processing

Author: Yale Strausser

Publisher: Momentum Press

Published: 2010

Total Pages: 217

ISBN-13: 1606500414

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"Characterization in Compound Semiconductor Processing is for scientists and engineers working with compound semiconductor materials and devices who are not characterization specialists. Materials and processes typically used in R&D and in the fabrication of GaAs, GaA1As, InP and HgCdTe based devices provide examples of common analytical problems. The book discusses a variety of characterization techniques to provide insight into how each individually, or in combination, might be used in solving problems associated with these materials. The book will help in the selection and application of the appropriate analytical techniques by its coverage of all stages of materials or device processing: substrate preparation, epitaxial growth, dielectric film deposition, contact formation and dopant introduction."--P. [4] of cover.