Slurry Handling
Slurry Handling

Author: N.P. Brown

Publisher: Springer Science & Business Media

Published: 1991-12-31

Total Pages: 708

ISBN-13: 9781851666454

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Microelectronic Applications of Chemical Mechanical Planarization
Microelectronic Applications of Chemical Mechanical Planarization

Author: Yuzhuo Li

Publisher: John Wiley & Sons

Published: 2007-10-19

Total Pages: 764

ISBN-13: 0471719196

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An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization: * Provides in-depth coverage of a wide range of state-of-the-art technologies and applications * Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips * Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP * Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP * Provides a perspective on the opportunities and challenges of the next fifteen years Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.

Chemical Mechanical Polishing in Silicon Processing
Chemical Mechanical Polishing in Silicon Processing

Author:

Publisher: Academic Press

Published: 1999-10-29

Total Pages: 325

ISBN-13: 0080864619

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Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did many of these volumes make an impact at the time of their publication, but they continue to be well-cited years after their original release. Recently, Professor Eicke R. Weber of the University of California at Berkeley joined as a co-editor of the series. Professor Weber, a well-known expert in the field of semiconductor materials, will further contribute to continuing the series' tradition of publishing timely, highly relevant, and long-impacting volumes. Some of the recent volumes, such as Hydrogen in Semiconductors, Imperfections in III/V Materials, Epitaxial Microstructures, High-Speed Heterostructure Devices, Oxygen in Silicon, and others promise that this tradition will be maintained and even expanded. Reflecting the truly interdisciplinary nature of the field that the series covers, the volumes in Semiconductors and Semimetals have been and will continue to be of great interest to physicists, chemists, materials scientists, and device engineers in modern industry.

FLUID FUEL REACTORS
FLUID FUEL REACTORS

Author: James A. Lane

Publisher: Addison-Wesley Pub. Co.

Published: 1958-01-01

Total Pages: 1364

ISBN-13:

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Landmark book written at Oak Ridge National Laboratory under the auspices of the Atomic Energy Commission as part of its Atoms for Peace program. FLUID FUEL REACTORS approaches to the subject of nuclear power from a chemical standpoint, rather than from the point of view of mechanical engineering. Today, the value of this approach has (finally) been recognized by venture capitalists such as Peter Thiel, philanthropists such as Bill Gates, and policy makers in Washington who have recently been passing advanced-reactor friendly legislation year after year. China's Navy is funding the Chinese Academy of Science Thorium Molten Salt Reactor program. The DoE (through GAIN) has funded essential Molten Salt research in the United States. Canada has funded Molten Salt research, and is currently conducting a pre-licensing vendor review. Dr. Anil Kokodkar, the former-head of India's nuclear program has stated, given a do-over he'd have pursued a liquid fuel (as opposed to a conventional solid fuel) approach to advanced nuclear. Molten Salt Reactor startups are flourishing, and typically, a single copy of FLUID FUEL REACTORS can be found in their head-office. The founders of these startups are driven to provide clean energy to developing nations, and replace today's polluting energy options which power western industry and prosperity. First printed in 1958, FLUID FUEL REACTORS continues to be cited as a useful reference by ORNL engineers, MSR startup employees, and those in academia. Alvin Weinberg suggested people should re-examine "dusty old books" such as FLUID FUEL REACTORS in his last recorded public interview (2 years before his death) at the University of Tennessee on 2004. Used physical copies have sold online for well over $1,000. 60 years after FLUID FUEL REACTORS was first published, it can now, for the first time, be enjoyed on digital reading devices, in a manner that supports adjustable font sizes and easy-to-read formatting... as opposed to looking at a series of bitmap images of words, like an animal.

Hog Manure Management, the Environment and Human Health
Hog Manure Management, the Environment and Human Health

Author: Tiffany T.Y. Guan

Publisher: Springer Science & Business Media

Published: 2011-06-28

Total Pages: 172

ISBN-13: 1461500311

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This volume provides a current look at how development of intensive live stock production, particularly hogs, has affected human health with respect to zoonotic diseases primarily transmitted by food but also by water, air and oc cupational activity. While information presented focuses on the development of increasing livestock production in Canada, examples are given and compar isons are made with other countries (Denmark, Taiwan, the Netherlands and the United States) where the levels of livestock production are much more intense and where the industry is more mature. Canada is also searching for solutions to enable handling the growing volume of its livestock waste properly. Lessons learned from the experience of those who have gone before are invaluable and are drawn together in this volume to serve as useful guidance for others in plot ting the courses of action possible to avoid serious environmental setbacks and negative human health effects through foodborne illness. A significant portion of the text is devoted to a discussion of enteric illness in humans caused by zoonotic pathogens. The second chapter deals with sur vival of pathogens (which cause foodborne illness) in manure environments. An evaluation of the human health hazard likely to occur from the use of ma nure as fertilizer is important because of the recent trend toward an increase in foodborne illness from the consumption of minimally processed fruits and vegetables that may have been fertilized with animal-derived organic materials.

Processing and Use of Organic Sludge and Liquid Agricultural Wastes
Processing and Use of Organic Sludge and Liquid Agricultural Wastes

Author: P. L'Hermite

Publisher: Springer Science & Business Media

Published: 2013-06-29

Total Pages: 585

ISBN-13: 9400947569

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Disposal of organic sludge and liquid agricultural wastes is a universal problem. Their production cannot be halted and as steps are taken to maintain or improve the quality of rivers and lakes it grows in quanti ty. The Commission's early awareness of the need for action to prepare for substantial growth in the Community's' sludge disposal problem led to the setting up of the COST 68 project to coordinate and guide European research and development work with particular emphasis on recycling sludge to agricultural land. Two years ago the field of research activi ties was extended to liquid agricultural wastes. This Symposium is the latest opportunity to provide a comprehensive review of the results of the project, to define current trends in practice and to establish by discussion the priorities for research over the next few years. The development of instrumentation and of analytical techniques during the period has extended our knowledge of the organic and inorganic constituents of sewage sludge and agricultural wastes and enabled us more readily to identify and measure the risks to which our general environment may be exposed when disposing of it. This evolution of understanding is a continuing process and an essential guide to the modification of disposal practices to achieve safer and more efficient operations. However, it is important to take a broad view of the application of research findings in the light of the considerable contrast in conditions in different parts of the world.