Ion-Solid Interactions
Ion-Solid Interactions

Author: Michael Nastasi

Publisher: Cambridge University Press

Published: 1996-03-29

Total Pages: 572

ISBN-13: 052137376X

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Comprehensive guide to an important materials science technique for students and researchers.

Rapid Thermal Processing
Rapid Thermal Processing

Author: Richard B. Fair

Publisher: Academic Press

Published: 2012-12-02

Total Pages: 441

ISBN-13: 0323139809

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This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Low Energy Ion-Surface Interactions
Low Energy Ion-Surface Interactions

Author: J. Wayne Rabalais

Publisher: John Wiley & Sons

Published: 1994-05-09

Total Pages: 624

ISBN-13:

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Low Energy Ion--Surface Interactions Edited by J. Wayne Rabalais, University of Houston, Texas, USA Recent advances in experimental techniques and theoretical methodologies mean that increasingly detailed and sophisticated studies of state--or energy--selected molecular ions can now be performed. Each volume in this series will be dedicated to reviewing a specific topic, emphasizing new experimental and theoretical developments in the study of ions. This volume details the current understanding of Low Energy Ion--Surface Interactions, along with some of the novel applications. Each of the ten chapters is authored by active researchers in the field who are at the forefront of research in their particular areas. This up-to-date compilation, detailing developments occurring within the last five years, will be particularly useful to researchers and teachers involved with Low Energy Ion--Surface Interactions.