Proceedings of the Second International Symposium on Ultra-Clean Processing of Silicon Surfaces
Author: Marc Heyns
Publisher:
Published: 1994
Total Pages: 388
ISBN-13:
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Author: Marc Heyns
Publisher:
Published: 1994
Total Pages: 388
ISBN-13:
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Publisher:
Published: 2003
Total Pages: 340
ISBN-13:
DOWNLOAD EBOOKAuthor: Marc Heyns
Publisher: Scitec Publications
Published: 2005
Total Pages: 396
ISBN-13: 9783908451068
DOWNLOAD EBOOKThis book is sub-divided into 10 different topical sections; each dealing with important issues in surface cleaning and preparation.
Author: Jerzy Rużyłło
Publisher: The Electrochemical Society
Published: 1998
Total Pages: 668
ISBN-13: 9781566771887
DOWNLOAD EBOOKAuthor: Yoshio Nishi
Publisher: CRC Press
Published: 2017-12-19
Total Pages: 1720
ISBN-13: 1420017667
DOWNLOAD EBOOKRetaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Author: Richard E. Novak
Publisher: The Electrochemical Society
Published: 1996
Total Pages: 642
ISBN-13: 9781566771153
DOWNLOAD EBOOKAuthor: Takao Abe
Publisher: The Electrochemical Society
Published: 1999
Total Pages: 548
ISBN-13: 9781566772235
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Publisher:
Published: 1998
Total Pages: 316
ISBN-13:
DOWNLOAD EBOOKThe proceedings of the Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98) cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry and topography, and its relationship to device performance and process yield. New areas of concern include: cleaning at the interconnect level, resist strip and polymer removal (dry and wet), cleaning and contamination aspects of metallization, wafer backside cleaning and cleaning after Chemical-Mechanical-Polishing (CMP). The large number of papers dealing with wet cleaning processes makes it clear that this is still the dominant technology, in spite of the fact that interesting new results have been obtained by using dry cleaning processes. Another important topic at this conference was the use of ozonated DI-water as a replacement for hydrogen peroxide, or even sulfuric-based mixtures, thus offering potentially great economic and environmental savings. Altogether, the 71 contributions presented at the symposium represent a timely and authoritative assessment of the state of the art of this very interesting field.
Author: John Condon Bean
Publisher:
Published: 1988
Total Pages: 682
ISBN-13:
DOWNLOAD EBOOKAuthor: P. Rai-Choudhury
Publisher: The Electrochemical Society
Published: 1997
Total Pages: 496
ISBN-13: 9781566771399
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