This volume presents current research and development in the fields of sensors and microsystems. Many aspects of disciplines related to sensors and microsystems are covered, ranging from materials science to complete applications and multifunctional systems. The variety of the topics and the quality of the papers offer readers an insight into the research status in Italy. The book contains selected contributions from 37 institutions in Italy — both academic institutions and public/private research institutions.
Chemical sensors are integral to the automation of myriad industrial processes, as well as everyday monitoring of such activities as public safety, engine performance, medical therapeutics, and many more. This massive reference work will cover all major categories of chemical sensor materials and devices, and their general functional usage...from monitoring and analyzing gases, to analyzing liquids and compounds of all kinds. This is THE reference work on sensors used for chemical detection and analysis. In this fourth volume will be found detailed background on all major classes of solid-state-based chemical sensors including metal oxide-based conductometric gas sensors; Schottky-, FET-, and work-function chemical sensors; capacitance-type chemical sensors; pyroelectric (thermoelectric) gas sensors; some new views on Pellistors; mass-sensitive chemical sensors; acoustic-wave-chemical sensors; and integrated chemical sensors.
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
The subjects chosen for this second volume have been carefully selected by the international editorial board to cover new, important progress in this fast-developing field. With contributions from many prominent researchers working at the frontiers of the chemical sensor field, the book provides up-to-date information and inspiration to all readers.
SAW devices are widely used in multitude of device concepts mainly in MEMS and communication electronics. As such, SAW based micro sensors, actuators and communication electronic devices are well known applications of SAW technology. For example, SAW based passive micro sensors are capable of measuring physical properties such as temperature, pressure, variation in chemical properties, and SAW based communication devices perform a range of signal processing functions, such as delay lines, filters, resonators, pulse compressors, and convolvers. In recent decades, SAW based low-powered actuators and microfluidic devices have significantly added a new dimension to SAW technology. This book consists of 20 exciting chapters composed by researchers and engineers active in the field of SAW technology, biomedical and other related engineering disciplines. The topics range from basic SAW theory, materials and phenomena to advanced applications such as sensors actuators, and communication systems. As such, in addition to theoretical analysis and numerical modelling such as Finite Element Modelling (FEM) and Finite Difference Methods (FDM) of SAW devices, SAW based actuators and micro motors, and SAW based micro sensors are some of the exciting applications presented in this book. This collection of up-to-date information and research outcomes on SAW technology will be of great interest, not only to all those working in SAW based technology, but also to many more who stand to benefit from an insight into the rich opportunities that this technology has to offer, especially to develop advanced, low-powered biomedical implants and passive communication devices.