Author: Francesco De Bona

Publisher: Springer Science & Business Media

Published: 2007-03-23

Total Pages: 219

ISBN-13: 321148549X

This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.