Advanced Processes for 193-nm Immersion Lithography

Advanced Processes for 193-nm Immersion Lithography

Author: Yayi Wei

Publisher: SPIE Press

Published: 2009

Total Pages: 338

ISBN-13: 0819475572

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This book is a comprehensive guide to advanced processes and materials used in 193-nm immersion lithography (193i). It is an important text for those new to the field as well as for current practitioners who want to broaden their understanding of this latest technology. The book can be used as course material for graduate students of electrical engineering, material sciences, physics, chemistry, and microelectronics engineering and can also be used to train engineers involved in the manufacture of integrated circuits. It provides techniques for selecting critical materials (topcoats, photoresists, and antireflective coatings) and optimizing immersion processes to ensure higher performance and lower defectivity at lower cost. This book also includes sections on shrinking, trimming, and smoothing of the resist pattern to reduce feature sizes and line-edge roughness. Finally, it describes the recent development of 193i in combination with double exposure and double patterning.


Sustainable Green Catalytic Processes

Sustainable Green Catalytic Processes

Author: Mousumi Sen

Publisher: John Wiley & Sons

Published: 2024-09-04

Total Pages: 564

ISBN-13: 1394212747

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This groundbreaking book offers an in-depth description of sustainable green catalytic processes that have emerged as the means to empower the existing protocols with greener, sustainable, and environmentally benign versions that hold enormous potential in industry and society. Growing worldwide concerns about environmental pollution and global warming have directed the attention of scientists towards approaches for developing sustainable protocols, and the need for employing greener and more sustainable catalytic approaches that are environmentally greener and more eco-friendly than current ones. Green and sustainable catalysts are the one class of catalysts that possess higher selectivity and activity, efficient recovery from the reaction medium, recyclability, cost-effectiveness and are prepared using environmentally benign preparation techniques. The most potent instrument in organic synthesis, and the cornerstone of green chemistry, is catalysis which has broadened the possibilities for organic transformations in the direction of a sustainable future. The catalyst has been playing a vital role, from the improvement of reaction conditions to enhanced selectivity towards the intended product and a decrease in the creation of byproducts. The purpose of this book is to highlight the developments made towards designing new catalysts (homogeneous, heterogeneous, organocatalyst, nanocatalyst, photocatalyst, nanophotocatalyst, biocatalyst, nanobiocatalyst, metal catalyst etc,.) and present the advancements in the field of chemical synthesis using greener catalytic routes with far-reaching applications. The other environmentally friendly method is the enzymatic synthesis of organic molecules, which substitutes safe reagents for those that imitate the biosynthetic route to synthesize the desired organic molecules. With its ability to produce transformations that occasionally enable the reduction of steps in a synthetic route, biophotocatalysis has long been recognized as a green technology and key to creating environmentally friendly and sustainable chemistry. The employment of sustainable green processes on the most crucial reaction steps of the synthetic protocol satisfies contemporary needs for environmentally friendly operations during the creation of valuable chemicals. Readers will find the book: details new catalysts development designs (homo and heterogeneous); presents the advancement of organic synthesis using greener catalytic routes with far-reaching applications; elaborates on preparation techniques for green and sustainable catalysts that possess higher activity, efficient recovery, and cost-effectiveness; discusses how to epitomize a green approach towards the preparation of organic moieties via enzymatic synthesis; analyzes nano-catalysis with green-based reagents and solvents that allow producers to follow the fundamental pillars of the green economy; elucidates green chemistry’s principles and metrics of the chemical’s life cycle and design through disposal. Audience The core audiences for this book include scientists and engineers working in green chemistry, materials science, photocatalysts, biotechnology, nanotechnology, waste minimization, and sustainability. This book is an excellent resource for graduate students, R&D experts, and researchers in academic and industrial fields of chemical synthesis.


Handbook for cleaning/decontamination of surfaces

Handbook for cleaning/decontamination of surfaces

Author: Ingegard Johansson

Publisher: Elsevier

Published: 2007-06-20

Total Pages: 994

ISBN-13: 0080555535

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The focus of Handbook for Cleaning/Decontamination of Surfaces lies on cleaning and decontamination of surfaces and solid matter, hard as well as soft. Bringing together in a 2-volume reference source: - current knowledge of the physico-chemical fundamentals underlying the cleaning process; - the different needs for cleaning and how these needs are met by various types of cleaning processes and cleaning agents, including novel approaches; - how to test that cleaning has taken place and to what extent; - the effects of cleaning on the environment; - future trends in cleaning and decontamination, for example the idea of changing surfaces, to hinder the absorbance of dirt and thus make cleaning easier.A brief introduction is given to the legal demands concerning the environment and a historical background, in terms of development of detergents, from soaps to the modern sophisticated formulations. Bactericides, their use and the environmental demands on them are covered. Thorough discussions of mechanisms for cleaning are given in several chapters, both general basic concepts and special cases like particle cleaning and cleaning using microemulsion concepts.* General understanding of how cleaning works, function of ingredients and formulations * Overview of environmental issues and demands from the society in the area * Gives basic formulas for cleaning preparations in most areas


Acrylate Polymers for Advanced Applications

Acrylate Polymers for Advanced Applications

Author: Ángel Serrano-Aroca

Publisher: BoD – Books on Demand

Published: 2020-05-06

Total Pages: 108

ISBN-13: 1789851831

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This book presents five chapters, organised into two sections, on the latest developments in acrylate polymers materials in terms of properties, new ideas in design, synthesis and detailed applications. Section I presents three chapters on acrylate polymer properties and advanced applications such as pH dependence acrylate-derivative polyelectrolyte properties and polymer material classification as acrylic heat resistant glass and polycarbonate antiballistic glass. Section II includes two chapters on acrylic-based materials in the form of hydrogels, interpenetrated polymer networks, composites and nanocomposites for biomedical and bioengineering applications such as tissue engineering, antimicrobial therapy, orthopaedics and ophthalmologic devices.


Beyond the Molecular Frontier

Beyond the Molecular Frontier

Author: National Research Council

Publisher: National Academies Press

Published: 2003-03-19

Total Pages: 238

ISBN-13: 0309168392

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Chemistry and chemical engineering have changed significantly in the last decade. They have broadened their scopeâ€"into biology, nanotechnology, materials science, computation, and advanced methods of process systems engineering and controlâ€"so much that the programs in most chemistry and chemical engineering departments now barely resemble the classical notion of chemistry. Beyond the Molecular Frontier brings together research, discovery, and invention across the entire spectrum of the chemical sciencesâ€"from fundamental, molecular-level chemistry to large-scale chemical processing technology. This reflects the way the field has evolved, the synergy at universities between research and education in chemistry and chemical engineering, and the way chemists and chemical engineers work together in industry. The astonishing developments in science and engineering during the 20th century have made it possible to dream of new goals that might previously have been considered unthinkable. This book identifies the key opportunities and challenges for the chemical sciences, from basic research to societal needs and from terrorism defense to environmental protection, and it looks at the ways in which chemists and chemical engineers can work together to contribute to an improved future.


Handbook of Nanophysics

Handbook of Nanophysics

Author: Klaus D. Sattler

Publisher: CRC Press

Published: 2010-09-17

Total Pages: 782

ISBN-13: 1420075519

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Many bottom-up and top-down techniques for nanomaterial and nanostructure generation have enabled the development of applications in nanoelectronics and nanophotonics. Handbook of Nanophysics: Nanoelectronics and Nanophotonics explores important recent applications of nanophysics in the areas of electronics and photonics. Each peer-reviewed c