Plasma Etching for Integrated Silicon Sensor Applications
Author: Yuan Xiong Li
Publisher:
Published: 1995
Total Pages: 244
ISBN-13:
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Author: Yuan Xiong Li
Publisher:
Published: 1995
Total Pages: 244
ISBN-13:
DOWNLOAD EBOOKAuthor: Marian Bartek
Publisher:
Published: 1995
Total Pages: 162
ISBN-13:
DOWNLOAD EBOOKAuthor: Miko Elwenspoek
Publisher: Cambridge University Press
Published: 2004-08-19
Total Pages: 424
ISBN-13: 9780521607674
DOWNLOAD EBOOKA comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.
Author: Arnaldo D'amico
Publisher: World Scientific
Published: 1995-05-31
Total Pages: 274
ISBN-13: 9814549312
DOWNLOAD EBOOKThis book contains 20 papers devoted to the domestic use of sensors. This up-to-date review fills a gap in the literature arising from the recent intense research and development of these sensors and takes an interdisciplinary approach to the operation principles of sensors and the preparation techniques, with particular regard to microelectronics techniques which allow the realization of sensor systems with integrated electronic circuitry.The applications of sensors in the domestic environment are accurately reviewed and the trends of future sensor development are also outlined.
Author: Munir H. Nayfeh
Publisher: Elsevier
Published: 2023-04-12
Total Pages: 568
ISBN-13: 044318674X
DOWNLOAD EBOOKIntegrated Silicon-Metal Systems at the Nanoscale: Applications in Photonics, Quantum Computing, Networking, and Internet is a comprehensive guide to the interaction, materials and functional integration at the nanoscale of the silicon-metal binary system and a variety of emerging and next-generation advanced device applications, from energy and electronics, to sensing, quantum computing and quantum internet networks. The book guides the readers through advanced techniques and etching processes, combining underlying principles, materials science, design, and operation of metal-Si nanodevices. Each chapter focuses on a specific use of integrated metal-silicon nanostructures, including storage and resistive next-generation nano memory and transistors, photo and molecular sensing, harvest and storage device electrodes, phosphor light converters, and hydrogen fuel cells, as well as future application areas, such as spin transistors, quantum computing, hybrid quantum devices, and quantum engineering, networking, and internet. - Provides detailed coverage of materials, design and operation of metal-Si nanodevices - Offers a step-by-step approach, supported by principles, methods, illustrations and equations - Explores a range of cutting-edge emerging applications across electronics, sensing and quantum computing
Author:
Publisher:
Published: 1995
Total Pages: 692
ISBN-13:
DOWNLOAD EBOOKAuthor: Regina Luttge
Publisher: William Andrew
Published: 2011-08-31
Total Pages: 314
ISBN-13: 081551977X
DOWNLOAD EBOOKMicrofabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. - Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments - Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro - Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) - Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) - Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling
Author: R.J. Shul
Publisher: Springer Science & Business Media
Published: 2011-06-28
Total Pages: 664
ISBN-13: 3642569897
DOWNLOAD EBOOKPattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Author: Regina Luttge
Publisher: William Andrew
Published: 2016-06-12
Total Pages: 280
ISBN-13: 0323389287
DOWNLOAD EBOOKNano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. - Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D - Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk - Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems
Author: R.F. Wolffenbuttel
Publisher: Springer Science & Business Media
Published:
Total Pages: 344
ISBN-13: 9780412709708
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