Nanotechnologies. A Guideline for Ellipsometry Application to Evaluate the Thickness of Nanoscale Films
Author: British Standards Institution
Publisher:
Published: 2021
Total Pages: 24
ISBN-13:
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Author: British Standards Institution
Publisher:
Published: 2021
Total Pages: 24
ISBN-13:
DOWNLOAD EBOOKAuthor: Maria Losurdo
Publisher: Springer Science & Business Media
Published: 2013-03-12
Total Pages: 740
ISBN-13: 3642339565
DOWNLOAD EBOOKThis book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
Author: Elio Passaglia
Publisher:
Published: 1964
Total Pages: 366
ISBN-13:
DOWNLOAD EBOOKAuthor: Jeffrey Craig Morris
Publisher:
Published: 2002
Total Pages: 68
ISBN-13:
DOWNLOAD EBOOKAuthor: R. M. A. Azzam
Publisher: North Holland
Published: 1987
Total Pages: 570
ISBN-13:
DOWNLOAD EBOOKEllipsometry is a unique optical technique of great sensitivity for in situ non-destructive characterization of surface (inter-facial) phenomena (reactions) utilizing the change in the state of polarization of a light-wave probe. Although known for almost a century, the use of ellipsometry has increased rapidly in the last two decades. Among the most significant recent developments are new applications, novel and automated instrumentation and techniques for error-free data analysis. This book provides the necessary analytical and experimental tools needed for competent understanding and use of these developments. It is directed to those who are already working in the field and, more importantly, to the newcomer who would otherwise have to sift through several hundred published papers. The authors first present a comprehensive study of the different mathematical representations of polarized light and how such light is processed by optical systems, going on to show how these tools are applied to the analysis of ellipsometer systems. To relate ellipsometric measurements to surface properties, use is then made of electromagnetic theory. Experimental techniques and apparatus are described and the many interesting applications of ellipsometry to surface and thin-film phenomena are reviewed. This reference work is addressed to researchers and students with a strong interest in surface and thin-film physics and optics and their applications. It is a must for libraries in the fields of solid state physics, physical chemistry, electro-chemistry, metallurgy and optical engineering.
Author: Hiroyuki Fujiwara
Publisher: John Wiley & Sons
Published: 2007-09-27
Total Pages: 388
ISBN-13: 9780470060186
DOWNLOAD EBOOKEllipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Author: Karsten Hinrichs
Publisher: Springer Science & Business Media
Published: 2013-10-24
Total Pages: 369
ISBN-13: 3642401287
DOWNLOAD EBOOKEllipsometry is the method of choice to determine the properties of surfaces and thin films. It provides comprehensive and sensitive characterization in contactless and non-invasive measurements. This book gives a state-of-the-art survey of ellipsometric investigations of organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. In conjunction with the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices and fabrication advances, the ellipsometric analysis of their optical and material properties has progressed rapidly in the recent years.
Author: Cheol Seong Hwang
Publisher: Springer Science & Business Media
Published: 2013-10-18
Total Pages: 266
ISBN-13: 146148054X
DOWNLOAD EBOOKOffering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Author: Arnulf Röseler
Publisher: VCH
Published: 1990
Total Pages: 168
ISBN-13:
DOWNLOAD EBOOKAuthor: Mark L. Brongersma
Publisher: Springer
Published: 2007-09-18
Total Pages: 270
ISBN-13: 1402043333
DOWNLOAD EBOOKThis book discusses a new class of photonic devices, known as surface plasmon nanophotonic structures. The book highlights several exciting new discoveries, while providing a clear discussion of the underlying physics, the nanofabrication issues, and the materials considerations involved in designing plasmonic devices with new functionality. Chapters written by the leaders in the field of plasmonics provide a solid background to each topic.