Micromachining of Molybdenum and Tungsten Silicide Thin Films
Author: Muh-Ling Ger
Publisher:
Published: 1994
Total Pages: 450
ISBN-13:
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Author: Muh-Ling Ger
Publisher:
Published: 1994
Total Pages: 450
ISBN-13:
DOWNLOAD EBOOKAuthor: C. C. Tang
Publisher:
Published: 1982
Total Pages: 5
ISBN-13:
DOWNLOAD EBOOKAuthor: Bharat Pathak
Publisher:
Published: 1990
Total Pages: 184
ISBN-13:
DOWNLOAD EBOOKAuthor: Li-Kuo Wu
Publisher:
Published: 1982
Total Pages: 84
ISBN-13:
DOWNLOAD EBOOKAuthor: E. L. Martin
Publisher:
Published: 1984
Total Pages: 20
ISBN-13:
DOWNLOAD EBOOKAuthor: Jun-Jye Yeh
Publisher:
Published: 1996
Total Pages:
ISBN-13:
DOWNLOAD EBOOKAuthor: Michael Phillip Siegal
Publisher:
Published: 1989
Total Pages: 264
ISBN-13:
DOWNLOAD EBOOKAuthor: Stephen A. Campbell
Publisher: OUP USA
Published: 2008-01-10
Total Pages: 0
ISBN-13: 9780195320176
DOWNLOAD EBOOKDesigned for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.
Author: Reza Ghodssi
Publisher: Springer Science & Business Media
Published: 2011-03-18
Total Pages: 1211
ISBN-13: 0387473181
DOWNLOAD EBOOKMEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.