Microlithography and Metrology in Micromachining
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Publisher:
Published: 1997
Total Pages: 154
ISBN-13:
DOWNLOAD EBOOKRead and Download eBook Full
Author:
Publisher:
Published: 1997
Total Pages: 154
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DOWNLOAD EBOOKAuthor: Michael T. Postek
Publisher: SPIE-International Society for Optical Engineering
Published: 1996-01-01
Total Pages: 296
ISBN-13: 9780819422781
DOWNLOAD EBOOKAuthor: Michael T. Postek
Publisher:
Published: 1995
Total Pages: 0
ISBN-13: 9780819420060
DOWNLOAD EBOOKAuthor: Michael T. Postek
Publisher:
Published: 1995
Total Pages:
ISBN-13: 9780819420060
DOWNLOAD EBOOKAuthor: National Institute of Standards and Technology (U.S.)
Publisher:
Published: 2000
Total Pages: 160
ISBN-13:
DOWNLOAD EBOOKAuthor: National Semiconductor Metrology Program (U.S.)
Publisher:
Published:
Total Pages: 136
ISBN-13:
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Published: 2000
Total Pages: 160
ISBN-13:
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Published: 1999
Total Pages: 148
ISBN-13:
DOWNLOAD EBOOKAuthor: Craig Friedrich
Publisher: SPIE-International Society for Optical Engineering
Published: 1997-01-01
Total Pages: 134
ISBN-13: 9780819426574
DOWNLOAD EBOOKAuthor: Mohamed Gad-el-Hak
Publisher: CRC Press
Published: 2001-09-27
Total Pages: 1386
ISBN-13: 9781420050905
DOWNLOAD EBOOKThe revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.