MEMS/MOEMS Components and Their Applications
MEMS/MOEMS Components and Their Applications

Author: Siegfried W. Janson

Publisher: Society of Photo Optical

Published: 2004

Total Pages: 232

ISBN-13: 9780819452528

DOWNLOAD EBOOK

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

MEMS and MOEMS Technology and Applications
MEMS and MOEMS Technology and Applications

Author: P. Rai-Choudhury

Publisher: SPIE Press

Published: 2000

Total Pages: 544

ISBN-13: 9780819437167

DOWNLOAD EBOOK

The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

MEMS/MOEMS Components and Their Applications II
MEMS/MOEMS Components and Their Applications II

Author: Albert Karl Henning

Publisher: Society of Photo Optical

Published: 2005

Total Pages: 242

ISBN-13: 9780819456915

DOWNLOAD EBOOK

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Mems/Nems
Mems/Nems

Author: Cornelius T. Leondes

Publisher: Springer

Published: 2006-09-06

Total Pages: 2094

ISBN-13: 9780387245201

DOWNLOAD EBOOK

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Mems/Nems
Mems/Nems

Author: Cornelius T. Leondes

Publisher: Springer

Published: 2006-09-06

Total Pages: 2094

ISBN-13: 9780387245201

DOWNLOAD EBOOK

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.