Mechanical Microsensors
Mechanical Microsensors

Author: M. Elwenspoek

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 306

ISBN-13: 3662043211

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This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).

MEMS Mechanical Sensors
MEMS Mechanical Sensors

Author: Stephen Beeby

Publisher: Artech House

Published: 2004

Total Pages: 282

ISBN-13: 1580535364

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Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

Mechanical Microsensors
Mechanical Microsensors

Author: Miko Elwenspoek

Publisher: Springer

Published: 2012-11-28

Total Pages: 295

ISBN-13: 9783662043226

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This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).

Micro Mechanical Transducers
Micro Mechanical Transducers

Author: Min-hang Bao

Publisher: Elsevier

Published: 2000-10-16

Total Pages: 393

ISBN-13: 0080524036

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Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.

Micro Mechanical Systems
Micro Mechanical Systems

Author: T. Fukuda

Publisher: Elsevier

Published: 1998-07-24

Total Pages: 278

ISBN-13: 0080536549

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In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

MEMS Mechanical Sensors
MEMS Mechanical Sensors

Author: Stephen Beeby

Publisher: Artech House

Published: 2004

Total Pages: 282

ISBN-13: 9781580538732

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Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.

Microsensors, MEMS, and Smart Devices
Microsensors, MEMS, and Smart Devices

Author: Julian W. Gardner

Publisher: John Wiley & Sons

Published: 2001

Total Pages: 536

ISBN-13:

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Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

Sensors and Measurement Systems
Sensors and Measurement Systems

Author: Walter Lang

Publisher: CRC Press

Published: 2022-09-01

Total Pages: 244

ISBN-13: 1000792986

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Sensors and measurement systems is an introduction to microsensors for engineering students in the final undergraduate or early graduate level, technicians who wants to know more about the systems they are using, and anybody curious enough to know what microsystems and microsensors can do. The book discusses five families of sensors: - Thermal sensors - Force and pressure sensors- Inertial sensors - Magnetic field sensors- Flow sensorsFor each sensor, theoretical, technology and application aspects are examined. The sensor function is modelled to understand sensitivity, resolution and noise. We ask ourselves: What do we want to measure? What are possible applications? How are the sensor chips made in the cleanroom? How are they mounted and integrated in a system?After reading this book, you should be able to:- Understand important thermal, mechanical, inertial and magnetic sensors- Work with characterization parameters for sensors- Choose sensors for a given application and apply them- Understand micromachining technologies for sensors

Advanced Nanomaterials for Inexpensive Gas Microsensors
Advanced Nanomaterials for Inexpensive Gas Microsensors

Author: Eduard Llobet Valero

Publisher: Elsevier

Published: 2019-07-15

Total Pages: 368

ISBN-13: 0128148276

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Advanced Nanomaterials for Inexpensive Gas Microsensors presents full coverage of the area of gas sensing nanomaterials, from materials, transducers and applications to the latest advanced results and future directions. A number of experts in the field present work on gas sensing nanomaterials including metal oxides, carbon based and hybrid materials, together with their fabrication and application. The book brings together three major themes: Several chapters address synthesis, functionalization, characterization of advanced nanomaterials, with emphasis on synthesis techniques to ease the integration of nanomaterials in transducers. These chapters encompass a wide spectrum of sensing technologies including advanced nanomaterials such as metal oxides, carbon materials and graphene, organic molecular materials, and atomic layers such as MoS2. The authors examine the coupling of sensitive nanomaterials to different types of transducer elements and their applications, including direct growth and additive fabrication techniques as a way to obtain inexpensive gas microsensors, principal transduction schemes, and advanced operating methods. Assess the value of major applications for gas microsensors, including air quality monitoring both indoors (buildings and vehicles) and outdoors, monitoring perishable goods and medical. For each application, potential issues are clearly identified, research directions to overcome these are suggested, and market analysis data is included. Advanced Nanomaterials for Inexpensive Gas Microsensors presents the latest research and most comprehensive coverage in the field of gas micro and nano sensors for research scientists, academics, graduate students, and R&D managers working on synthesis of nanomaterials and fabrication of sensing systems, in a wide range of areas in electrical and material engineering, physical chemistry, electrochemistry and physics. Presents technological solutions and applications of gas sensors in varied areas of chemistry, physics, material science, and engineering Examines advanced operating methods (e.g., temperature modulation, self-heating, light-activated response, noise methods) to enhance stability, sensitivity, selectivity and reduce power consumption Provides a critical review of current applications and their expected future evolution, demonstrating which are the most promising approaches and what can be expected from the development of inexpensive gas micro- and nanosensors

Analysis and Design Principles of MEMS Devices
Analysis and Design Principles of MEMS Devices

Author: Minhang Bao

Publisher: Elsevier

Published: 2005-04-12

Total Pages: 327

ISBN-13: 008045562X

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Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.