Fabrication and Design of Resonant Microdevices
Fabrication and Design of Resonant Microdevices

Author: Behraad Bahreyni

Publisher: William Andrew

Published: 2008-10-20

Total Pages: 234

ISBN-13: 0815519710

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This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. - Offers numerous academic and industrial examples of resonant MEMS - Provides an analytic model of device behaviour - Explains two-port systems in detail - Devotes ample space to excitation and signal detection methods - Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

MEMS Vibratory Gyroscopes
MEMS Vibratory Gyroscopes

Author: Cenk Acar

Publisher: Springer Science & Business Media

Published: 2008-12-16

Total Pages: 262

ISBN-13: 0387095365

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MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

INS/CNS/GNSS Integrated Navigation Technology
INS/CNS/GNSS Integrated Navigation Technology

Author: Wei Quan

Publisher: Springer

Published: 2015-01-22

Total Pages: 381

ISBN-13: 366245159X

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This book not only introduces the principles of INS, CNS and GNSS, the related filters and semi-physical simulation, but also systematically discusses the key technologies needed for integrated navigations of INS/GNSS, INS/CNS, and INS/CNS/GNSS, respectively. INS/CNS/GNSS integrated navigation technology has established itself as an effective tool for precise positioning navigation, which can make full use of the complementary characteristics of different navigation sub-systems and greatly improve the accuracy and reliability of the integrated navigation system. The book offers a valuable reference guide for graduate students, engineers and researchers in the fields of navigation and its control. Dr. Wei Quan, Dr. Jianli Li, Dr. Xiaolin Gong and Dr. Jiancheng Fang are all researchers at the Beijing University of Aeronautics and Astronautics.

Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope

Author: Huiliang Cao

Publisher: Springer Nature

Published: 2023-04-17

Total Pages: 231

ISBN-13: 9811992479

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This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

MEMS Sensors and Resonators
MEMS Sensors and Resonators

Author: Frederic Nabki

Publisher: MDPI

Published: 2020-05-27

Total Pages: 164

ISBN-13: 3039288652

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Microelectromechanical systems (MEMS) have had a profound impact on a wide range of applications. The degree of miniaturization made possible by MEMS technology has significantly improved the functionalities of many systems, and the performance of MEMS has steadily improved as its uses augment. Notably, MEMS sensors have been prevalent in motion sensing applications for decades, and the sensing mechanisms leveraged by MEMS have been continuously extended to applications spanning the detection of gases, magnetic fields, electromagnetic radiation, and more. In parallel, MEMS resonators have become an emerging field of MEMS and affected subfields such as electronic timing and filtering, and energy harvesting. They have, in addition, enabled a wide range of resonant sensors. For many years now, MEMS have been the basis of various industrial successes, often building on novel academic research. Accordingly, this Special Issue explores many research innovations in MEMS sensors and resonators, from biomedical applications to energy harvesting, gas sensing, resonant sensing, and timing.

An Introduction to Microelectromechanical Systems Engineering
An Introduction to Microelectromechanical Systems Engineering

Author: Nadim Maluf

Publisher: Artech House

Published: 2004

Total Pages: 312

ISBN-13: 9781580535915

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Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.