Materials and Devices for Smart Systems II: Volume 888
Materials and Devices for Smart Systems II: Volume 888

Author: Yasubumi Furuya

Publisher:

Published: 2006-04-07

Total Pages: 408

ISBN-13:

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Smart/intelligent systems is a primary technology for present and future applications in areas ranging from everyday life to aerospace missions, from civil to military environments, from robots to information technology. Smart materials are the critical foundation for high-performance smart devices, and smart devices are fundamental components for smart systems. The three cannot be separated. This book bridges the fields of smart materials, sensing and actuating devices, and intelligent systems, and provides an opportunity for researchers from all three arenas to channel information into a coherent, interdisciplinary community. Topics include: piezoelectric actuators; novel devices and systems; shape memory alloys and magnetostrictive devices; nanometer-scale processing and properties; piezoelectric materials; sensor materials and devices; and electroactive polymer actuators.

Ultraclean Semiconductor Processing Technology and Surface Chemical Cleaning and Passivation
Ultraclean Semiconductor Processing Technology and Surface Chemical Cleaning and Passivation

Author: Michael Liehr

Publisher:

Published: 1995

Total Pages: 440

ISBN-13:

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Wafer cleaning, microcontamination and surface passivation are the key focus of this proceedings volume, the 3rd in a successful series from MRS. It is a field in which control of surface chemistry and surface morphology, as well as particle and molecular contamination removal, are of critical importance. This volume expands the scope of the topic to include ultraclean technology in a broader sense, emphasizing the identification and characterization of trace contamination, strategies for removal, and equipment considerations, as well as critical limits for impact on devices. Novel processes, such as chemical mechanical polishing (CMP), and their ramifications for contamination removal are also addressed.