Microsystems and Nanotechnology
Microsystems and Nanotechnology

Author: Zhaoying Zhou

Publisher: Springer Science & Business Media

Published: 2012-08-30

Total Pages: 1011

ISBN-13: 3642182933

DOWNLOAD EBOOK

“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.

Micro/Nanolithography
Micro/Nanolithography

Author: Jagannathan Thirumalai

Publisher: BoD – Books on Demand

Published: 2018-05-02

Total Pages: 136

ISBN-13: 1789230306

DOWNLOAD EBOOK

The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is concomitant with the lithographic ways and means of deposition, optimization parameters and their wide technological applications. This book consists of six chapters comprehending with eminence of lithography, fabrication and reproduction of periodic nanopyramid structures using UV nanoimprint lithography for solar cell applications, large-area nanoimprint lithography and applications, micro-/nanopatterning on polymers, OPC under immersion lithography associated to novel luminescence applications, achromatic Talbot lithography (ATL) and the soft X-ray interference lithography. Individual chapters provide a base for a wide range of readers from different fiels, students and researchers, who may be doing research pertinent to the topics discussed in this book and find basic as well as advanced principles of designated subjects related to these phenomena explained plainly. The book contains six chapters by experts in different fields of lithographic fabrication and technology from over 15 research institutes across the globe.

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Author: Seongbo Shim

Publisher: Springer

Published: 2018-03-21

Total Pages: 144

ISBN-13: 331976294X

DOWNLOAD EBOOK

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.

Laser Micro-Nano-Manufacturing and 3D Microprinting
Laser Micro-Nano-Manufacturing and 3D Microprinting

Author: Anming Hu

Publisher: Springer Nature

Published: 2020-11-28

Total Pages: 360

ISBN-13: 3030593134

DOWNLOAD EBOOK

This book provides a comprehensive overview of the latest advances in laser techniques for micro-nano-manufacturing and an in-depth analysis of applications, such as 3D printing and nanojoining. Lasers have gained increasing significance as a precise tool for advanced manufacturing. Written by world leading scientists, the first part of the book presents the fundamentals of laser interaction with materials at the micro- and nanoscale, including multiphoton excitation and nonthermal melting, and allows readers to better understand advanced processing. In the second part, the authors focus on various advanced fabrications, such as laser peening, surface nanoengineering, and plasmonic heating. Finally, case studies are devoted to special applications, such as 3D printing, microfluidics devices, energy devices, and plasmonic and photonic waveguides. This book integrates both theoretical and experimental analysis. The combination of tutorial chapters and concentrated case studies will be critically attractive to undergraduate and graduate students, researchers, and engineers in the relevant fields. Readers will grasp the full picture of the application of laser for micro-nanomanufacturing and 3D printing.

Alternative Lithography
Alternative Lithography

Author: C. M. Sotomayor Torres

Publisher: Springer Science & Business Media

Published: 2003-12-31

Total Pages: 362

ISBN-13: 9780306478581

DOWNLOAD EBOOK

This book intended for academic and industrial research scientists and engineers, as well as industrial laboratories working on sensors, biotechnology and opto/electronics details in 17 chapters state-of-the-art technologies and the prospects for micro-contact printing and nanoimprint lithography.

Multiphoton Lithography
Multiphoton Lithography

Author: Jürgen Stampfl

Publisher: John Wiley & Sons

Published: 2016-09-12

Total Pages: 408

ISBN-13: 3527682686

DOWNLOAD EBOOK

This first book on this fascinating, interdisciplinary topic meets the much-felt need for an up-to-date overview of the field. Written with both beginners and professionals in mind, this ready reference begins with an introductory section explaining the basics of the various multi-photon and photochemical processes together with a description of the equipment needed. A team of leading international experts provides the latest research results on such materials as new photoinitiators, hybrid photopolymers, and metallic carbon nanotube composites. They also cover promising applications and prospective trends, including photonic crystals, microfluidic devices, biological scaffolds, metamaterials, waveguides, and functionalized hydrogels. By bringing together the essentials for both industrial and academic researchers, this is an invaluable companion for materials scientists, polymer chemists, surface chemists, surface physicists, biophysicists, and medical scientists working with 3D micro- and nanostructures.

A Hybrid Nano-Imprinting Lithography Method for Nano-Patterning Based on Infrared Pulsed Laser Heating
A Hybrid Nano-Imprinting Lithography Method for Nano-Patterning Based on Infrared Pulsed Laser Heating

Author:

Publisher:

Published: 2006

Total Pages: 14

ISBN-13:

DOWNLOAD EBOOK

In this research project we present a novel method of nano-imprinting which adopts important features of conventional nano-imprinting lithography (NIL) and the newly developed laser-assisted direct imprinting (LADI) method. It utilizes an Nd-YAG pulsed laser of wavelength 1064 nm which can easily penetrate and also heat up a silicon mold which is pressed against a resist layer deposited on a substrate. The fast rising temperature in the silicon mold can momentarily melt the resist layer so that the mold is imprinting into the resist layer. After the pattern is transformed, standard nano-imprinting lithography processes can be applied to the substrate for nano-fabrication. This new method has several advantages over existing nano-imprinting methods mostly due to the fast heating-up of silicon mold by high intensity IR laser pulse and therefore has no thermal drifting problem. Both the theoretical modeling and experimental results of this novel IR-laser assisted imprinting method will be investigated.