Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

Author: P. Rai-Choudhury

Publisher: SPIE Press

Published: 1997

Total Pages: 706

ISBN-13: 9780819423795

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Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

Author: P. Rai-Choudhury

Publisher: SPIE Press

Published: 1997

Total Pages: 780

ISBN-13: 9780819423788

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The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.

Lithography Process Control
Lithography Process Control

Author: Harry J. Levinson

Publisher: SPIE Press

Published: 1999

Total Pages: 210

ISBN-13: 9780819430526

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This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.

Silicon
Silicon

Author: Paul Siffert

Publisher: Springer Science & Business Media

Published: 2013-03-09

Total Pages: 552

ISBN-13: 3662098970

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With topics ranging from epitaxy through lattice defects and doping to quantum computation, this book provides a personalized survey of the development and use of silicon, the basis for the revolutionary changes in our lives sometimes called "The Silicon Age." Beginning with the very first developments more than 50 years ago, this reports on all aspects of silicon and silicon technology up to its use in exciting new technologies, including a glance at possible future developments.