Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
Author: P. Rai-Choudhury
Publisher: IET
Published: 1997
Total Pages: 716
ISBN-13: 9780852969113
DOWNLOAD EBOOKContains useful process details, recipes, tables, charts and includes numerous device applications.