Gettering and Defect Engineering in Semiconductor Technology III
Author: M. Kittler
Publisher: Trans Tech Publications Ltd
Published: 1989-01-01
Total Pages: 618
ISBN-13: 3035706441
DOWNLOAD EBOOKProceedings of the 3rd International Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST '89) held at Garzau, GDR, October 1989