Spectroscopic Ellipsometry
Spectroscopic Ellipsometry

Author: Harland G. Tompkins

Publisher: Momentum Press

Published: 2015-12-16

Total Pages: 138

ISBN-13: 1606507281

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Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.

Spectroscopic Ellipsometry
Spectroscopic Ellipsometry

Author: Hiroyuki Fujiwara

Publisher: John Wiley & Sons

Published: 2007-09-27

Total Pages: 388

ISBN-13: 9780470060186

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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Ellipsometry for Industrial Applications
Ellipsometry for Industrial Applications

Author: Karl Riedling

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 109

ISBN-13: 3709189616

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During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic "in situ" measurements are suggested.

A User's Guide to Ellipsometry
A User's Guide to Ellipsometry

Author: Harland G. Tompkins

Publisher: Courier Corporation

Published: 2013-03-21

Total Pages: 496

ISBN-13: 0486151921

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This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.

A Practical Guide to Optical Metrology for Thin Films
A Practical Guide to Optical Metrology for Thin Films

Author: Michael Quinten

Publisher: John Wiley & Sons

Published: 2012-09-24

Total Pages: 212

ISBN-13: 3527664351

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A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon. Aimed at industrial and academic researchers, engineers, developers and manufacturers involved in all areas of optical layer and thin optical film measurement and metrology, process control, real-time monitoring, and applications.

Ellipsometry at the Nanoscale
Ellipsometry at the Nanoscale

Author: Maria Losurdo

Publisher: Springer Science & Business Media

Published: 2013-03-12

Total Pages: 740

ISBN-13: 3642339565

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This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.

Review of Progress in Quantitative Nondestructive Evaluation
Review of Progress in Quantitative Nondestructive Evaluation

Author: Donald O. Thompson

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 1124

ISBN-13: 1461537428

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The objective of this study was to increase the understanding of damage in composite materials with through-the-thickness reinforcements. As a first step it was necessary to develop new ultrasonic imaging technology to better assess internal damage of the composite. A useful ultrasonic imaging technique has been successfully developed to assess the internal damage of composite panels. The ultrasonic technique accurately determines the size of the internal damage. It was found that the ultrasonic imaging technique was better able to assess the damage in a composite panel with through-the-thickness reinforcements than by destructively sectioning the specimen and visual inspection under a microscope. Microscopic determination of crack location and lengths in a composite panel with through-the-thickness reinforcements was almost impossible. Five composite compression-after-impact panels were tested. The compression-after-impact strength of the panels with the through-the thickness reinforcements was almost twice that of the comparable panel without through-the-thickness reinforcement. REFERENCES 1. B.T. Smith, J.S. Heyman, A.M. Buoncristiani, Earl D. Blodgett, J.G. Miller, and S.M. Freeman, Correlation of the Deply TechniQue with the Ultrasonic Imaging of Impact Damage in Graphite/Epoxy Composites, Materials Evaluation, vol. 47, NO. 12, December 1989, pp 1408-1416. 2. NASA Tech Briefs, June 1987, p. 28. 3. P.M. Gammel, Improved Ultrasonic Detection using Analytic Signal Magnitude. Ultrasonics, Vol. 19, March 1981, pp 73-76. 4. R.C. Heyser, Determination of Loudspeaker Signal Arrival Times Part ~ Journal of the Audio Engineering Society, Vol. 19, Dec. 1971, pp 902-905.

Handbook of Thermal Analysis and Calorimetry
Handbook of Thermal Analysis and Calorimetry

Author: Stephen Z.D. Cheng

Publisher: Elsevier

Published: 2002-12-09

Total Pages: 859

ISBN-13: 008052740X

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As a new and exciting field of interdisciplinary macromolecular science and engineering, polymeric materials will have a profound presence in 21st century chemical, pharmaceutical, biomedical, manufacturing, infrastructure, electronic, optical and information technologies. The origin of this field derived from an area of polymer science and engineering encompassing plastic technologies. The field is rapidly expanding to incorporate new interdisciplinary research areas such as biomaterials, macromolecular biology, novel macromolecular structures, environmental macromolecular science and engineering, innovative and nano-fabrications of products, and is translating discoveries into technologies.·Unique in combining scientific concepts with technological aspects·Provides a comprehensive and broad coverage of thermodynamic and thermal behaviours of various polymeric materials as well as methodologies of thermal analysis and calorimetry·Contributions are from both pioneering scientists and the new generation of researchers

Handbook of Deposition Technologies for Films and Coatings
Handbook of Deposition Technologies for Films and Coatings

Author: Rointan Framroze Bunshah

Publisher: William Andrew

Published: 1994

Total Pages: 888

ISBN-13: 0815513372

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This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.