Electron Beams, Lenses, and Optics
Electron Beams, Lenses, and Optics

Author: A El-Kareh

Publisher: Elsevier

Published: 2012-12-02

Total Pages: 428

ISBN-13: 0323150772

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Electron Beams, Lenses, and Optics, Volume I deals with the physics of electron beams, lenses, and optics and covers topics ranging from the paraxial ray in symmetrical electric fields to the analytical determination of electrostatic fields. The general properties of electrostatic lenses and the electrostatic immersion lens are also considered. Each equation except one is derived from first principles. To emphasize the physics of the discussions, elementary mathematics is used as much as possible. Comprised of eight chapters, this volume begins with an introduction to the laws that govern electron beams and light rays, including Snell's law. Some fundamental limitations to the analogy between electron optics and light optics are evaluated, together with electron rays in plane symmetrical and in rotationally symmetrical fields. Subsequent chapters explore the general properties of electrostatic lenses and electrostatic immersion lenses; electrostatic unipotential lenses; and formation of optical images by rotationally symmetrical magnetic fields. The final chapter is devoted to the symmetrical magnetic lens and its magnetic scalar potential, paying particular attention to the flux density along the z axis and factors to consider in the design of the pole pieces. This book will be of interest to students, practitioners, and researchers in physics.

Electron Beams, Lenses, and Optics
Electron Beams, Lenses, and Optics

Author: A. B. El-Kareh

Publisher: Academic Press

Published: 2013-10-22

Total Pages: 335

ISBN-13: 1483271781

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Electron Beams, Lenses, and Optics, Volume 2 deals with the aberrations relating to electronic optics. This book discusses the geometrical aberrations of lenses; spherical aberration of electric and magnetic lenses; and measurement of the spherical aberration of various electric and magnetic lenses. The theory of diffraction; influence of space charge in high density electron beams; and chromatic aberration are also deliberated. This publication likewise covers the classification of the geometrical aberrations; derivation of the coefficient of spherical aberration according to Glaser; and pepper-pot method or Hartmann's test. The Fraunhofers diffraction through a circular aperture; force due to coulomb repulsion; and upper limit of the chromatic aberration of magnetic lenses are also included. This volume is valuable to industrial scientists and engineers concerned with electrostatic and magnetic lenses.

Electron and Ion Optics
Electron and Ion Optics

Author: Miklos Szilagyi

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 550

ISBN-13: 1461309239

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The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.

Applied Charged Particle Optics
Applied Charged Particle Optics

Author: Helmut Liebl

Publisher: Springer Science & Business Media

Published: 2008-01-12

Total Pages: 131

ISBN-13: 3540719253

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Written by a pioneer in the field, this overview of charged particle optics provides a solid introduction to the subject area for all physicists wishing to design their own apparatus or better understand the instruments with which they work. It begins by introducing electrostatic lenses and fields used for acceleration, focusing and deflection of ions or electrons. Subsequent chapters give detailed descriptions of electrostatic deflection elements, uniform and non-uniform magnetic sector fields, image aberrations, and, finally, fringe field confinement.

Scanning Electron Microscopy
Scanning Electron Microscopy

Author: Ludwig Reimer

Publisher: Springer

Published: 2013-11-11

Total Pages: 538

ISBN-13: 3540389679

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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Focusing of Charged Particles V2
Focusing of Charged Particles V2

Author: Albert Septier

Publisher: Elsevier

Published: 2012-12-02

Total Pages: 487

ISBN-13: 0323148468

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Focusing of Charged Particles, Volume II presents the aspects of particle optics, including the electron, the ion optical domains, and the accelerator field. This book provides a detailed analysis of the principles of the laws of propagation of beams. Comprised of three parts encompassing three chapters, this volume starts with an overview of how a beam of charged particles traverses a region that is at a uniform, constant, electrostatic potential. This book then discusses the principle of charge repulsion effect by which the space charge of the beam modifies the potential in the region that it traverses. Other chapters examine the general design techniques and performances obtainable for electron guns applicable for use in initiating a beam for linear beam tubes that is given in a condensed form. The last chapter deals with the two stable charged particles that can be accelerated, namely, protons and electrons. This book is a valuable resource to physicists, accelerator experts, and experimenters in search of interactions in the detector target.

Geometrical Charged-Particle Optics
Geometrical Charged-Particle Optics

Author: Harald H. Rose

Publisher: Springer Science & Business Media

Published: 2009

Total Pages: 422

ISBN-13: 3540859152

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This resource covering all theoretical aspects of modern geometrical charged-particle optics is aimed at anyone involved in the design of electron optical instruments and beam-guiding systems for charged particles.

Istfa 2003
Istfa 2003

Author: ASM International

Publisher: ASM International

Published: 2003-01-01

Total Pages: 534

ISBN-13: 1615030867

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Handbook of Charged Particle Optics
Handbook of Charged Particle Optics

Author: Jon Orloff

Publisher: CRC Press

Published: 2017-12-19

Total Pages: 938

ISBN-13: 1351835777

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With the growing proliferation of nanotechnologies, powerful imaging technologies are being developed to operate at the sub-nanometer scale. The newest edition of a bestseller, the Handbook of Charged Particle Optics, Second Edition provides essential background information for the design and operation of high resolution focused probe instruments. The book’s unique approach covers both the theoretical and practical knowledge of high resolution probe forming instruments. The second edition features new chapters on aberration correction and applications of gas phase field ionization sources. With the inclusion of additional references to past and present work in the field, this second edition offers perfectly calibrated coverage of the field’s cutting-edge technologies with added insight into how they work. Written by the leading research scientists, the second edition of the Handbook of Charged Particle Optics is a complete guide to understanding, designing, and using high resolution probe instrumentation.