MEMS Design, Fabrication, Characterization, and Packaging
Author: Uwe F. W. Behringer
Publisher: SPIE-International Society for Optical Engineering
Published: 2001
Total Pages: 460
ISBN-13:
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Author: Uwe F. W. Behringer
Publisher: SPIE-International Society for Optical Engineering
Published: 2001
Total Pages: 460
ISBN-13:
DOWNLOAD EBOOKAuthor: Mohamed Gad-el-Hak
Publisher: CRC Press
Published: 2005-11-29
Total Pages: 678
ISBN-13: 1420036564
DOWNLOAD EBOOKThoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.
Author: Nicola Pio Belfiore
Publisher: MDPI
Published: 2019-01-10
Total Pages: 201
ISBN-13: 3038975036
DOWNLOAD EBOOKThis book is a printed edition of the Special Issue "Micromanipulation" that was published in Actuators
Author: Dongqing Li
Publisher: Springer Science & Business Media
Published: 2008-08-06
Total Pages: 2242
ISBN-13: 0387324682
DOWNLOAD EBOOKCovering all aspects of transport phenomena on the nano- and micro-scale, this encyclopedia features over 750 entries in three alphabetically-arranged volumes including the most up-to-date research, insights, and applied techniques across all areas. Coverage includes electrical double-layers, optofluidics, DNC lab-on-a-chip, nanosensors, and more.
Author: Gary J. O'Brien
Publisher:
Published: 2004
Total Pages: 318
ISBN-13:
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Publisher:
Published: 2000
Total Pages: 920
ISBN-13:
DOWNLOAD EBOOKAuthor: Fabian Chavez Martinez
Publisher:
Published: 2005
Total Pages: 196
ISBN-13:
DOWNLOAD EBOOKAuthor:
Publisher:
Published: 2000
Total Pages: 916
ISBN-13:
DOWNLOAD EBOOKThis text constitutes proceedings from the International Symposium on Microelectronics that took place in Boston, Massachusetts in September, 2000.
Author: IEEE International Conference on Micro Electro Mechanical Systems 17, 2004, Maastricht, The Netherlands
Publisher:
Published: 2004
Total Pages: 868
ISBN-13: 9780780382657
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