Defect and Impurity Engineered Semiconductors and Devices
Author:
Publisher:
Published: 1995
Total Pages: 1178
ISBN-13:
DOWNLOAD EBOOKPosts
Semiconductor Wafer Bonding : Science, Technology, and Applications V
Author: Charles E. Hunt
Publisher: The Electrochemical Society
Published: 2001
Total Pages: 498
ISBN-13: 9781566772587
DOWNLOAD EBOOKAmerican Book Publishing Record
Author:
Publisher:
Published: 1995
Total Pages: 1044
ISBN-13:
DOWNLOAD EBOOKMechanical Behavior of Diamond and Other Forms of Carbon
Author:
Publisher:
Published: 1995
Total Pages: 504
ISBN-13:
DOWNLOAD EBOOKResearch & Development
Author:
Publisher:
Published: 1994-07
Total Pages: 554
ISBN-13:
DOWNLOAD EBOOKElectrical & Electronics Abstracts
Author:
Publisher:
Published: 1997
Total Pages: 2304
ISBN-13:
DOWNLOAD EBOOKInternational Aerospace Abstracts
Author:
Publisher:
Published: 1999
Total Pages: 1016
ISBN-13:
DOWNLOAD EBOOKGovernment Reports Annual Index
Author:
Publisher:
Published: 1994
Total Pages: 1372
ISBN-13:
DOWNLOAD EBOOKChemical-Mechanical Planarization of Semiconductor Materials
Author: M.R. Oliver
Publisher: Springer Science & Business Media
Published: 2004-01-26
Total Pages: 444
ISBN-13: 9783540431817
DOWNLOAD EBOOKThis book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.
