Atomic Layer Deposition for Semiconductors

Atomic Layer Deposition for Semiconductors

Author: Cheol Seong Hwang

Publisher: Springer Science & Business Media

Published: 2013-10-18

Total Pages: 266

ISBN-13: 146148054X

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Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.


Practical Applications of Laser Ablation

Practical Applications of Laser Ablation

Author: Dongfang Yang

Publisher: BoD – Books on Demand

Published: 2021-07-14

Total Pages: 174

ISBN-13: 1839683031

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Laser ablation refers to the phenomenon in which an intense laser beam irradiates the surface of a solid to induce instant local removal of atoms by a thermal or non-thermal mechanism. Through eight chapters of original research studies and literature reviews written by experts from the international scientific community, this book presents theoretical and experimental aspects of the laser ablation phenomenon for processing material including pulsed laser deposition of thin films, laser surface modification, laser machining and laser nanoparticle formation. It also includes a study of the dynamics of plasmas generated by laser ablation of multi-component materials and an overview of laser-induced breakdown spectroscopy (LIBS) and laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) techniques for chemical analysis.


Pulsed Laser Ablation of Solids

Pulsed Laser Ablation of Solids

Author: Mihai Stafe

Publisher: Springer Science & Business Media

Published: 2013-11-09

Total Pages: 241

ISBN-13: 3642409784

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The book introduces ‘the state of the art' of pulsed laser ablation and its applications. It is based on recent theoretical and experimental studies. The book reaches from the basics to advanced topics of pulsed laser ablation. Theoretical and experimental fundamental phenomena involved in pulsed laser ablation are discussed with respect to material properties, laser wavelength, fluence and intensity regime of the light absorbed linearly or non-linearly in the target material. The energy absorbed by the electrons leads to atom/molecule excitation, ionization and/or direct chemical bond breaking and is also transferred to the lattice leading to material heating and phase transitions. Experimental non-invasive optical methods for analyzing these phenomena in real time are described. Theoretical models for pulsed laser ablation and phase transitions induced by laser beams and laser-vapour/plasma interaction during the plume expansion above the target are also presented. Calculations of the ablation speed and dimensions of the ablated micro- and nano-structures are performed. The validity and required refinement of different models in different experimental conditions is provided. The pulsed laser deposition process which bases on collecting the ablated particles on a surface is analyzed in terms of efficiency and quality of the deposited films as a function of ambient conditions, target material, laser parameters and substrate characteristics. The interaction between the incident laser and the ablation plasma is analyzed with respect to its influence on the structures of the deposited films and its capacity to generate high harmonics and single attosecond pulses which are highly desirable in pump-probe experiments.


Laser Ablation in Liquids

Laser Ablation in Liquids

Author: Guowei Yang

Publisher: CRC Press

Published: 2012-02-22

Total Pages: 1166

ISBN-13: 9814241520

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This book focuses on the fundamental concepts and physical and chemical aspects of pulsed laser ablation of solid targets in liquid environments and its applications in the preparation of nanomaterials and fabrication of nanostructures. The areas of focus include basic thermodynamic and kinetic processes of laser ablation in liquids, and its applic