Characterization of DC Reactive Sputtered Indium Tin Oxide Thin Films
Characterization of DC Reactive Sputtered Indium Tin Oxide Thin Films

Author: Philip Infante

Publisher:

Published: 1994

Total Pages: 212

ISBN-13:

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Indium tin oxide (ITO) is a widely used transparent conductor due to its ability to ofer higher conductance and better etch ability over other transparent conductors. ITO has been utilized as transparent electrodes in liquid crystal displays and heterojunction solar cells, as transparent heat reflecting films, as the sensing medium in gas sensors, and in optoelectronic device applications. In general, these films are characterized by high transparency in the visible spectra, high reflectance in the IR and absorption in the UV regions, and near metallic conductivity.

Sputtered Indium Tin Oxide Films for Optoelectronic Applications
Sputtered Indium Tin Oxide Films for Optoelectronic Applications

Author: Oleksandr Malik

Publisher:

Published: 2017

Total Pages:

ISBN-13:

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High-quality indium tin oxide (ITO) films have been fabricated using a DC sputtering technique in a pure argon atmosphere with a postannealing in an oxygen environment at atmosphere pressure. Structural, morphological, and electro-optical parameters of the ITO films were studied at different annealing temperatures for the films fabricated on two types of glass substrates, soda lime and alkali-free substrates. A comparative analysis shows that low-cost soda lime substrates are suitable for the fabrication of high-quality nanocrystalline ITO films after annealing them at 300°C. This result is of great importance for reducing the cost of thin film solar cells, in which ITO films serve as transparent conducting electrodes. We present a comparison of the properties of sputtered ITO films with those fabricated using a spray pyrolysis deposition technique, which is useful for some optoelectronic applications.