Author: Athanasios Dimoulas

Publisher: Springer Science & Business Media

Published: 2008-01-01

Total Pages: 397

ISBN-13: 354071491X

This book provides a comprehensive monograph on gate stacks in semiconductor technology. It covers the major latest developments and basics and will be useful as a reference work for researchers, engineers and graduate students alike. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.