Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7

Author: Dieter K. Schroder

Publisher: The Electrochemical Society

Published: 2007

Total Pages: 406

ISBN-13: 1566775698

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Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques as well as advances in routine analytical technology applied to semiconductor process development and manufacture. The hardcover edition includes a CD-ROM of ECS Transactions, Volume 10, Issue 1, Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007). The PDF edition also includes the ALTECH 2007 papers.


Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

Author: Bernd O. Kolbesen

Publisher: The Electrochemical Society

Published: 2003

Total Pages: 572

ISBN-13: 9781566773485

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.".. ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.


Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment

Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment

Author: P. J. Timans

Publisher: The Electrochemical Society

Published: 2008-05

Total Pages: 488

ISBN-13: 1566776260

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This issue describes processing, materials and equipment for CMOS front-end integration including gate stack, source/drain and channel engineering. Topics: strained Si/SiGe and Si/SiGe on insulator; high-mobility channels including III-V¿s, etc.; nanowires and carbon nanotubes; high-k dielectrics, metal and FUSI gate electrodes; doping/annealing for ultra-shallow junctions; low-resistivity contacts; advanced deposition (e.g. ALD, CVD, MBE), RTP, UV, plasma and laser-assisted processes.


Frontiers In Electronics

Frontiers In Electronics

Author: Sorin Cristoloveanu

Publisher: World Scientific

Published: 2009-08-06

Total Pages: 335

ISBN-13: 9814468045

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Frontiers in Electronics contains the selected best papers presented at the Workshop on Frontiers in Electronics (WOFE-07). This meeting was the fifth in the series of WOFE workshops, and strongly reinforced the tradition of scientific quality and visionary research. The issues addressed ranged from THz and infrared electronics to nanoelectronics and photonics. The papers focused on the fabrication, characterization and applications of nanodevices; wide band gap structures; and state-of-the-art FETs. The participants also discussed the device physics and processing issues including aspects related to SOI and germanium-on-insulator technologies, TFTs, and advanced CMOS and MOSFETs. It is this cross-pollination between different but related fields that made this conference very special.This book, which goes beyond the publication of the WOFE Proceedings, includes full-length invited papers selected at the conference and reviewed by international leaders. The book is divided into four distinct sections, with the common denominator throughout being the “nano-device”, present under various metamorphoses in the wide CMOS and optoelectronics arena./a


Silicon-on-Insulator Technology and Devices 14

Silicon-on-Insulator Technology and Devices 14

Author: Yasuhisa Omura

Publisher: The Electrochemical Society

Published: 2009

Total Pages: 357

ISBN-13: 1566777127

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This issue of ECS Transactions contains papers on silicon-on-insulator subjects including devices, device physics, modelling, simulations, microelectronics, photonics, nano-technology, integrated circuits, radiation hardness, material characterization, reliability, and sensors


Advances in Photovoltaics: Part 1

Advances in Photovoltaics: Part 1

Author:

Publisher: Academic Press

Published: 2012-12-28

Total Pages: 303

ISBN-13: 0123884209

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Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. Originally widely known as the "Willardson and Beer" Series, it has succeeded in publishing numerous landmark volumes and chapters. The series publishes timely, highly relevant volumes intended for long-term impact and reflecting the truly interdisciplinary nature of the field. The volumes in Semiconductors and Semimetals have been and will continue to be of great interest to physicists, chemists, materials scientists, and device engineers in academia, scientific laboratories and modern industry. - The series publishes timely, highly relevant volumes intended for long-term impact and reflecting the truly interdisciplinary nature of the field


High Purity Silicon 11

High Purity Silicon 11

Author: E. Simoen

Publisher: The Electrochemical Society

Published: 2010-10

Total Pages: 262

ISBN-13: 1566778301

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The papers included in this issue of ECS Transactions were originally presented in the symposium ¿High Purity Silicon 11¿, held during the 218th meeting of The Electrochemical Society, in Las Vegas, Nevada from October 10 to 15, 2010.