Thin Films From Free Atoms and Particles

Thin Films From Free Atoms and Particles

Author: Kenneth Klabunde

Publisher: Elsevier

Published: 2012-12-02

Total Pages: 376

ISBN-13: 0323153488

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Thin Films from Free Atoms and Particles is an eight-chapter text that describes the primary reaction modes of atoms or coordination-deficient particles. This book presents first an introduction to free atoms and particles, followed by a chapter describing the embryonic growth of films, such as dimers, trimers, and other small telomers formed and detected. The next chapters discuss the understanding of discharge processes for forming free atoms and particles. The remaining chapters deal with the technology, techniques, and materials in thin films. Physicists, engineers, materials scientists, and chemists will find this book of great value.


Micromachining Using Electrochemical Discharge Phenomenon

Micromachining Using Electrochemical Discharge Phenomenon

Author: Rolf Wuthrich

Publisher: Elsevier

Published: 2009-07-30

Total Pages: 197

ISBN-13: 0815519834

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This book explains the fundamentals of SACE, promotes the technology, and encourages researchers and engineers from industry to use it for their specific applications. Therefore, the book, after presenting in details the fundaments of SACE (in particular the Electrochemical Discharges), deals mainly with practical aspects of implementing the machining technology. The book is written so that researchers from fields other than micro-technology (e.g., from life science) will be able to build a simple machining set-up, together with his mechanical work-shop, for individual needs. - Topics include: micro- and electrochemical discharge machining (including glass), microfluidics, non-conventional manufacturing, electrochemical discharges, biocompatibility, and anode effects - Provides applicable information for engineers in industry dealing with micromachining of glass, polymers, and ceramics - Covers a range of microfluidic devices (including micro-TAS) with applications in various fields like chemistry and life sciences


Semiconductor Materials Analysis and Fabrication Process Control

Semiconductor Materials Analysis and Fabrication Process Control

Author: G.M. Crean

Publisher: Elsevier

Published: 2012-12-02

Total Pages: 352

ISBN-13: 0444596917

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There is a growing awareness that the successful implementation of novel material systems and technology steps in the fabrication of microelectronic and optoelectronic devices, is critically dependent on the understanding and control of the materials, the process steps and their interactions. The contributions in this volume demonstrate that characterisation and analysis techniques are an essential support mechanism for research in these fields. Current major research themes are reviewed both in the development and application of diagnostic techniques for advanced materials analysis and fabrication process control. Two distinct trends are elucidated: the emergence and evaluation of sophisticated in situ optical diagnostic techniques such as photoreflectance and spectroellipsometry and the industrial application of ultra-high sensitivity chemical analysis techniques for contamination monitoring. The volume will serve as a useful and timely overview of this increasingly important field.