Aerosol Chemical Vapor Deposition of Metal Oxide Films

Aerosol Chemical Vapor Deposition of Metal Oxide Films

Author:

Publisher:

Published: 1994

Total Pages:

ISBN-13:

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A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said FIELD OF THE INVENTION The present invention relates to the field of film coating deposition techniques, and more particularly to the deposition of multicomponent metal oxide films by aerosol chemical vapor deposition. This invention is the result of a contract with the Department of Energy (Contract No. W-7405-ENG-36).


Scalable Synthesis of Nanostructured Metal Oxide Films Using Aerosol Chemical Vapor Deposition for Energy Storage Applications

Scalable Synthesis of Nanostructured Metal Oxide Films Using Aerosol Chemical Vapor Deposition for Energy Storage Applications

Author: Clayton T. Kacica

Publisher:

Published: 2020

Total Pages: 191

ISBN-13:

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As global energy consumption continues to rapidly increase, the need for new technologies to meet this demand in a sustainable way. Renewable sources such as solar and wind power are being increasingly utilized for electricity generation. However, the intermittent nature of these sources requires large-scale energy storage to reliably provide consistent power. Current grid-scale energy storage usually involves pumped hydroelectric systems, which are limited by location, or flywheel systems, which have limited use in high-power low-energy applications. Electrochemical storage solutions, such as lithium-ion batteries, provide robust energy storage that is not limited by location with a range of power and energy densities. Current lithium-ion battery technologies are used to power everything from electric vehicles (EVs) to handheld electronics. However, as the power and energy requirements of these devices continue to increase, new battery technologies will be needed. For example, the shift toward EVs faces issues related to vehicle batteries, including vehicle range, charging time, and cost.Thin-film batteries have several characteristics, such as high energy and power densities and long cycle life, that make them promising for next-generation lithium-ion batteries. Additionally, materials that have major drawbacks, such as large changes in volume during battery cycling, are possible to use in thin film systems. High-rate charging is also possible using thin film lithium-ion batteries due to the short distance lithium ions must intercalate during the charging process.In this thesis, an aerosol chemical vapor deposition (ACVD) technique is used to synthesize structured, single-crystal thin-film battery electrodes in a single-step process that operates at atmospheric pressure. Several materials were synthesized, such as SnO2, TiO2, and doped TiO2, for use as lithium-ion battery electrodes. A scale-up study on the ACVD reactor was conducted by developing a coupled computational fluid-dynamics -- aerosol dynamics model. This model was used to study the effect of reactor operating parameters on the resultant thin film morphology, deposition rate, and uniformity. Finally, a lithium-sulfur battery electrode was synthesized using a TiO2 thin film synthesized via ACVD combined with a metal-organic-framework synthesized using electrospray.


Chemical Vapour Deposition

Chemical Vapour Deposition

Author: Anthony C. Jones

Publisher: Royal Society of Chemistry

Published: 2009

Total Pages: 600

ISBN-13: 0854044655

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"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket