Materials Research Society Symposia Proceedings. Volume 23. Energy Beam-Solid Interactions and Transient Thermal Processing Held at Boston, Massachusetts on 14-17 November 1983
Materials Research Society Symposia Proceedings. Volume 23. Energy Beam-Solid Interactions and Transient Thermal Processing Held at Boston, Massachusetts on 14-17 November 1983

Author: J. C. C. Fan

Publisher:

Published: 1984

Total Pages: 802

ISBN-13:

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Major Topics include: SOI(Silicon On Insulators); Technologies for Integrated Circuits; Fundamentals of Energy Beam Interactions with Solids; Applications of Energy Beams in Material and Device Processing; Device Applications of Rapid Thermal Processing; Fundamental Mechanisms; Transient Thermal Processing of Silicon; Defect Mechanisms and Crystallization of Semiconductor on Insulators; SOI Materials and Devices; Compound Semiconductors; and Metallic Alloys.